【作者】 赵致民； 许兴胜； 李芳； 刘育梁； 陈弘达；

【Author】 ZHAOZhimin XUXingsheng LI Fang LIUYiuliangCHEN Hongda(R&D Center on Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, 100083)

【机构】 中国科学院半导体研究所光电子研发中心；

【摘要】 制作高O值、小模体积纳米尺寸的光子晶体微腔激光器是光子集成中的一个重要的研究领域.本文使用时域有限差分法(Difference Time-Domain Method)计算了半导体材料上三角晶格和正方品格空气孔阵列光子晶体微腔的谐振模波长,得到了这种三维Air-bridge对称结构下微腔谐振模波长随晶格常数a和孔半径r的近似变化关系.当孔半径r为一常数时,表现为晶格常数改变1nm,谐振波长变化约3nm的线性关系.并以此为指导设计制作了InP基光子晶体微腔,为实际制作光子晶体激光器提供理论指导.更多还原

【Abstract】 Fabrication of nanometer size photonic crystal microcavity lasers which are high Q and small mode volume is an important research field of photonic integration. In this paper. Difference Time-Domain Method is used to calculated the resonant mode wavelength of triangular lattice and square lattice air hole photonic crystal microcavities made of semiconductor material. The wavelength change of the three dimensional air-bridge symmetry structure according to the lattice constant and the hole radius is obtained. When the hole radius is set as a constant parameter, it is a linear relationship which about three nanometer change of the resonant mode wavelength respect to only one nanometer change of lattice constant. Photonic crystal microcavities based on InP are designed and fabricated, and the calculation result could provide a theory instruction to fabricate the photonic crystal lasers.更多还原