【作者】 艾家和； 高阳； 耿魁伟； 曾飞； 潘峰；

【Author】 Ai Jiahe,Gao Yang,Geng Kuiwei,Zeng Fei and Pan Feng (Key Lab. of Advanced Materials, Dept. of Materials Science and Engineering, Tsinghua University, Beijing, 100084, China)

【机构】 清华大学材料系先进材料教育部重点实验室；

【摘要】 本文用直流磁控溅射方法在玻璃基片上制备了具有不同坡莫合金层厚度的坡莫合金/铜磁性多层膜,并采用纳米力学系统分别以压痕法、划痕法测定了坡莫合金层厚度对多层膜显微硬度、弹性模量以及划痕的临界载荷、宽度和深度等的影响。研究结果表明:在既定的接触深度,多层膜的显微硬度及弹性模量随坡莫合金层厚度变化不大,它们分别约为4.5 GPa和80 GPa,比坡莫合金单层膜的值低而比铜单层膜的值高;坡莫合金层厚度对多层膜微观摩擦学性能有较大的影响:随坡莫合金层厚度减小,特别是当其小于等于1.6nm时,划痕有较高的临界载荷、较小的宽度和较浅的残余深度;多层膜的划痕临界载荷高于坡莫合金单层膜的值。更多还原

【Abstract】 Magnetic permalloy/copper multilayers with varying thickness of permalloy layers were deposited on glass substrates by magnetron sputtering. The mechanical properties of the multilayers were studied with a nanomechanical system. The results show that the thickness of the multilayers strongly affects its microtribological properties. For instance,as the thickness decreases,especially when it is equal to and less than 1.6 nm, the scratch has a rather high critical load,small scratch width and low residue scratch depth. However,at a given contact depth, the microhardness and the modulus of the multilayers, different from the counterparts of homogenous permalloy and copper layer, are almost independent of the thickness.更多还原