【作者】 王阳； 陈军宁； 柯导明； 孟坚；

【Author】 Wang Yang Chen Junning Ke Daoming Meng Jian Dept. of Electronic Engineering, Anhui University, Hefei 230039,China

【机构】 安徽大学电子系；

【摘要】 随着科技的发展,越来越多的方面需要应用到湿度传感器。若能利用CMOS工艺将传感器部分、信号的处理电路等集成在同一块芯片上,从而进行大规模集成,就可以降低成本,减小整个系统的尺寸,提高系统的可靠性。这里主要介绍了湿度传感器的分类,比较了电容型、电阻型、离子敏型湿度传感器的感湿原理和结构特点。其中具体介绍了CMOS电容型湿度传感器的感湿机理和其信号处理电路,并利用了Cadence公司的Spectre工具对其中的运放电路进行了仿真。最后,对CMOS湿度传感器的应用发展的前景进行了展望。更多还原

【Abstract】 With the development of the science and technology, humidity sensors are applied to more and more aspects. If we integrate the sensor elements and signal processing circuits on a single chip by using CMOS fabrication, we can process the large-scale integration, reduce the cost, minish the size of the whole system and advance the reliability. This paper describes the classification of the humidity sensors. It compares the sensing principle and the construction characteristics of capacitive humidity sensors, resistive humidity sensors and ion sensitive humidity sensors. It describes specially the sensing principle of CMOS capacitive humidity sensors and its signal-processing circuits. The circuit of operational amplifier is simulated by the Spectre of Cadence Corporation. Finally prospective applications of CMOS humidity sensors are predicted.更多还原