【作者】 马云飞； 王自鑫； 江绍基； 佘卫龙； 朱析； 蔡志岗； 李宝军；

【Author】 MA Yun-fei,WANG Zi-xin,JIANG SHao-ji,SHE Wei-long,ZHU Xi,CAI ZHi-gang,LI Bao-jun es, Sun Yat-Sen University, Guangzhou 510275,China)

【机构】 中山大学光电材料与技术国家重点实验室；

【摘要】 在光学真空镀膜膜厚监控过程中,近红外波段信号弱、外界干扰大、信噪比低,难于检测监控。运用相干检测、锁相放大原理,在光学真空镀膜机可见光波段监控系统的基础上,自行研制锁相放大器和改装近红外探头,成功地实现了近红外信号的压噪、放大、滤波和检测监控。更多还原

【Abstract】 To amplify, filter, and monitor weak near infrared signal from strong noise during optical coating, a locking-in amplifier with near infrared detector has been designed based on the principle of visible optical monitoring system for optical coating. By using the designed locking-in amplifier, the weak near infrared signal was monitored successfully from the strong noise during optical coating and the characteristics of the weak near infrared signal was characterized easily.更多还原