【作者】 张太平； 阎桂珍； 张大成； 阮勇； 陈正豪； 邢怡铭；

【Author】 Zhang Taiping~1 Yan Guizhen~1 Zhang Dacheng~1 Ruan Yong~1 Philip C.H. Chan~2 I-Ming Hsing~3 ~1(Microelectronics Institute of Peking University, Beijing 100871, China) ~2(Department of Electrical and Electronics Engineering, Hong Kong University of Science and Technology, Hong Kong SAR, China) ~3(Department of Chemical Enginnering, Hong Kong University of Science and Technology, Hong Kong SAR, China)

【机构】 北京大学微电子所； 香港科技大学电气电子工程系； 香港科技大学化工系；

【摘要】 小型PEM燃料电池电极有着比较复杂的细微结构,电极担负了收集电荷,传输燃料,催化剂载体和构架支撑的功能。介绍了一种新的带有燃料传输孔的硅片电极制造方法,并且在它的表面上生长了一层多孔硅薄膜,以利于燃料传输,扩散和渗透。多孔硅孔径分布和深度范围从百纳米到几十纳米。当催化剂Pt溅射到它表面时,受多孔硅形状的限制,Pt就形成了不连续微小颗粒,对乙醇有比较强的催化作用。用此电极组装的电池,使用乙醇或甲醇燃料时分别有0.55V和0.6V的输出电压。更多还原

【Abstract】 The electrode of micro fuel cell is an important element. It describes a novel approach of fabrication of micro fuel cell electrode. The electrode has three function: collect current, catalyst loader;transport fuel. A new method to produce density holes and using plasma to etch poly-silicon becoming porous on the interface is developed. The ora side of the hole is 60 × 60 um~2. The porous silicon (PS) is hundreds nm. The liquid fuel (methanol or alcohol) can be flowed into the interface among catalyst and PS and proton-conducting membrane without any bump and heater to drive. Platinum was sputtering as small grain on the porous surface. It has a stronger catalysis. The electrodes with this kind of structure are used in a micro fuel cell and are measured.更多还原