【作者】 秦宁； 赵湛； 张博军； 陈绍凤； 夏善红；

【Author】 Qin Ning~(1,2) Zhao Zhan~1 Zhang Bojun~1 Chen Shaofeng~1 Xia Shanhong~1 ~1(State Key Laboratory of Transducer Technology, Institute of Electronics, China Academy of Sciences, Beijing 100080, China) ~2(Graduate School of China Academy, Sciences, Beijing 100039, China)

【机构】 中国科学院电子学研究所传感技术国家重点实验室；

【摘要】 利用MEMS技术设计和制作了一种微量取样执行器。执行器由微针、微通道、反应室、电极以及永磁微阵列等各部分组成,通过外部磁场可以实现双向线性地驱动。利用SU-8光刻胶为主要材料,采用多级曝光和电铸金属实现3D结构的工艺技术,研制出了微针执行器的雏形器件。针尖的尺寸为500μm×60μm×60μm,针孔截面为20μm×20μm。更多还原

【Abstract】 A micro-sampling actuator driven by electromagnetic force is designed and fabricated by MEMS technology. It is composed of microneedle, microchannal, reaction chamber, and permanet magnet array, and it can be driven bidirectionally and linearly by the magnetic field outside. The rudiments of microneedle actuator have been developed, which is mainly made of SU-8 photoresist, and its 3D construction is fabricated by multistep exposal and electroforming metal. The size of microneedle is 500μm × 60μm × 60μm, and its aperture section is 20μm × 20μm.更多还原