【作者】 田文超； 贾建援；

【Author】 Tian Wenchao Jia Jianyuan (School of Electro-mechanical Engineering, Xidian University, Xi’an 710071, China)

【机构】 西安电子科技大学机电工程学院；

【摘要】 针对MEMS产品步入市场所面临的问题,总结出MEMS亟待解决的粘着、静电力计算、微流、纳米摩擦、检测、薄膜应力和表面粗糙度七个问题;并对粘着、静电力算、微流和检测计4个问题,分别提出W-S模型微观连续介质理论、电荷分布积分法、当量粘度系数修正法和SPM法4种解决方法,为MEMS的进一步研究提供理论基础。更多还原

【Abstract】 In order for MEMS to be into market, the seven key problems in MEMS, which are sticking, electrostatic force computing, micro-flow, nano-friction, inspection, membrane stress and surface rough degree, are summarized. The W-S micro continuum medium principle, electron distribution integrating, equivalent viscosity method and scanning probe method are discussed to solve the sticking, electrostatic force computer, micro-flow and inspection problems respectively.更多还原