【作者】 余晓芬； 魏玉凤；

【Author】 WEI Yu-feng , YU Xiao-fen School of Instrumentation, Hefei University of Technology, 230009

【机构】 合肥工业大学仪器仪表学院；

【摘要】 一个具有纳米级定位精度的六自由度微动工作台,柔性铰链的结构参数、各铰链间的相对位置如何确定决定了微动工作台的预期性能能否实现,而利用有限元分析软件ANSYS模拟工作台各自由度的运动特性,可以辅助微动台的结构设计。本文介绍了利用ANSYS对单个柔性铰链及工作台整体结构的参数化分析方法,分别分析了各自由度最大运动量时各构件应力和驱动力的大小,根据工作台设计要求,通过分析比较不同参数值对应的有限元分析结果,选择结构参数最优解,实现微动工作台结构的优化设计。更多还原

【Abstract】 Whether a 6-DOF micro table with nanometer precision can realize it’s desired performance lie on how to determine structural parameter of flexure hinge and relative position between flexure hinges. Finite element software ANSYS can aided design structure of micro table by simulate motion characteristic of every degree of freedom. This paper presented parametrization analytical procedure of single flexure hinge and whole micro table by using ANSYS. Analyzed stress of every structural member and actuating force in several when every degree of freedom motion was maximum. Through analyze finite element analysis results, which correspond to different parameter values, choose optimal solution of structural parameter based on design requirement to realize optimum design of micro table structure.更多还原