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IBED沉积Cr-N膜层组织结构及微动摩擦学性能研究

Microstructure and fretting wear behaviour of Cr-N coatings by IBED

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【作者】 唐宾李咏梅秦林

【Author】 TANG Bin, LI Yongmei, QIN LinResearch Institute of Surface Engineering,Taiyuan University of Technology,Taiyuan, China 030024

【机构】 太原理工大学表面工程研究所

【摘要】 不同氮离子辅助轰击能量制备Cr-N膜层,利用纳米压入仪及显微硬度计分别测试单晶Si片上膜层的硬度及断裂韧性值KIC,XRD、XPS及EPMA分析离子轰击能量对镀层组织结构的影响。结果表明,随着氮离子轰击能量从4keV增加到8keV和12keV,Cr-N镀层中金属Cr组分减少,CrN组分增加。采用较低能量氮离子轰击所得到的涂层由于有金属Cr的存在,涂层硬度虽有所降低,但断裂韧性KIC数值较高。选择较低的4keV辅助轰击能量,在M2高速钢基体上沉积Cr-N涂层,并研究其在大气及常规水介质中的微动摩擦学行为。膜层在空气介质中具有较优异的摩擦学性能,但在水介质中摩擦系数,尤其是磨损量较基材明显增加。

【Abstract】 Cr-N coatings were synthesized with different levels of bombarding energy by nitrogen ion. The Microstructure and composition of coatings were investigated by XRD, XPS and EPMA, and the fretting wear properties of the coating on M2 high speed steel and M2 base material were evaluated by fretting wear test. Results indicate that the fraction of CrN phase increases with increasing of the bombarding energy from 4keV, 8keV to 12keV, and reaches a predominant state. For 4keV one, the Cr/N ratio is more than one. The 8keV and 12keV ones are free of Cr constitute. As the effect of depassivation-repassivation, the fretting wear properties of Cr-N coating under atmosphere and water conditions show different wear mechanism for Cr-N coating and base.

  • 【会议录名称】 2004全国荷电粒子源、粒子束学术会议论文集
  • 【会议名称】2004全国荷电粒子源、粒子束学术会议
  • 【会议时间】2004-08
  • 【会议地点】中国乌鲁木齐
  • 【分类号】TB43
  • 【主办单位】中国电工技术学会电子束离子束专业委员会、粒子加速器学会离子源专业组、中国电子学会焊接专业委员会、北京电机工程学会加速器专业委员会
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