【作者】 朱霞高； 林松盛； 侯惠君； 袁镇海； 戴达煌；

【Author】 Zhu Xiagao Lin Songsheng Hou Huijun Yuan Zhenhai Dai Dahuang Guangzhou Research Institute of Nonferrous Metals, Guangzhou,510651

【机构】 广州有色金属研究院；

【摘要】 本文在传统的RF-PCVD设备上采用磁约束增强技术,在玻璃上低温沉积(小于150℃)出优质无色透明类金刚石保护膜(Diamond-like Carbon,DLC)。膜/基可见光透光率高(大于90%),有相当高的硬度(HV9-11 GPa),膜层抗划伤性好(抗19.6 N戒刀刀尖刻划),耐紫外线辐射。更多还原

【Abstract】 By introducing the external magnetic field to enhance the plasma density of the radio-frequency plasma chemical vapor deposition ( RF-PCVD) , colorless transparent Diamond-like Carbon (DLC) Films were deposited on the glass substrate at low temperature (<150℃). The luminous transmittance of the DLC/Substrate was over than 90% (at visible light range) and the hardness of it was high (HV9 -11 GPa). Both the scratch resistance (19.6N load to the tool nose scratching on the DLC Films) and the ultraviolet irradiation resistance of the DLC films were excellent.更多还原