【作者】 江美玲； 丁爱娣； 张学敏； 冯晓梅； 马斌； 梁平治；

【Author】 JIANG Mei-ling, DING Ai-di, ZHANG Xue-min, FENG Xiao-mei, MA Bin, LIANG Ping-zhi (Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,CHN)

【机构】 中国科学院上海技术物理研究所；

【摘要】 采用微型滤光片与硅探测器直接耦合的方式,研制了5×4元和3×4元两种多波段硅探测器组件。组件可探测412-865 nm八个波段,带宽分别为20和40 nm。由于采用了短波增强,提高近红外波段响应率和响应速度,降低暗电流,减小串音及提高可靠性等一系列措施,使研制的组件达到了很高的性能:412 nm的响应率为0.14 A/W,暗电流为5×10-10A,结电容小于20 pF,串音小于7%。,满足了海洋水色扫描仪的使用要求。更多还原

【Abstract】 By using Si photodetectors coupling with micro-filter directly,two types of multi-band Si photodetector modules with 5×4 and 3×4 pixels were developed. The detectors are highly sensitive to the eight bands from 412 nm to 865 nm,and the bandwidths are 20 and 40 nm, respectively. Due to use the technologies for the short wave enhancement, the improvement of responsivity and response speed in the near infrared band, the reduction of the dark current and crosstalk, and reliability enhancement, the good module performances are obtained. The responsivity is 0. 14 A/W at 412 nm,dark current,junction capacitance and crosstalk are less than 5×10-10 A, 20 pF and 7% ,respectively. The developed detector modules satisfy the requirements of the ocean watercolor scanner.更多还原