【作者】 邓辉； 余晓芬； 俞建卫；

【Author】 Deng Hui Yu Xiaofen Yu Jianwei(School of Instrumentation, Hefei Univ. of Technology, Hefei 230009, China) (College of Mechanical and Automotive Engineering, Hefei Univ. of Technology, Hefei 230009, China)

【机构】 合肥工业大学仪器仪表学院； 合肥工业大学机械与汽车工程学院；

【摘要】 为提高微动工作台开环控制的定位精度,选用了性能稳定的新型钨青铜型多层片式压电陶瓷驱动器作为驱动元件。同时根据压电晶体的电畴结构和晶体结构原理,研制出抗迟滞驱动控制软件。实验证明,采用了这种新的驱动方式可以使驱动器的迟滞误差下降70%～90%。更多还原

【Abstract】 New stable characteristic tungsten bronze monolithic multi-layer piezoelectric actuators are adopted as driving component in order to increase the positioning accuracy of the open-loop controlling micro-table? based on the principle of the electric domain and crystal lattices structure of piezoelectric actuators, anti-hysteresis control software is developed. The experiment results show the hysteresis error of actuators decreases 70%~90% after adopting this new driving mode.更多还原