【作者】 李发； 刘征； 鲁燕萍； 刘慧卿； 高陇桥；

【Author】 LI Fa,LIU Zheng,LU Yan-ping, LIU Hui-qing,GAO Long-qiao (Beijing Vacuum Electronics Research Institute, Beijing 100016, China)

【机构】 北京真空电子技术研究所；

【摘要】 对AlN陶瓷材料制备过程中影响其性能尤其是导热性能的诸多因素进行实验,摸索出一套较合理的制备工艺,制造出性能较稳定、导热率高的AlN陶瓷材料。观察了AlN陶瓷的微结构并得出某些结论。已加工出AlN陶瓷夹持杆、收集极和输出窗,在微波管上试用,取得一些经验。更多还原

【Abstract】 In the paper, the effects of many processing factors on AIN ceramic material were investigated. A proper process was developed to manufacture AIN ceramic with high-thermal conductivity and better dielectric properties. Microstructure of AIN ceramic was observed and some conclusions were obtained. AIN ceramic supporting bar, collector and output window were processed and used in microwave tubes. Some experiences were obtained.更多还原