【作者】 张兰； 马会中； 李会军； 杨仕娥； 姚宁； 胡欢陵； 张兵临；

【Author】 ZHANG Lan, MA Hui-zhong, LI Hui-jun, YANG Shi-e, YAO Ning, HU Huan-ling, ZHANG Bing-linDepartment of Engineering Mechanics, ’Physics Department, Zhengzhou University, Zhengzhou, Henan 450052, China Anhui Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Hefei, Anhui 230031, China)

【机构】 郑州大学工程力学系； 郑州大学物理工程学院； 中国科学院安徽光学精密机械研究所；

【摘要】 报道了一种碳氮薄膜材料的拉曼光谱,该光谱明显具有两个特征拉曼峰,和已有的碳基薄膜及碳氢薄膜相区别,其峰值位置分别位于1400cm^-1及1370cm^-1。根据X射线衍射（XRD）分析和扫描电子显微镜（SEM）对该薄膜的形貌观察,初步认定该薄膜是由纳米级含氮弯曲层状石墨结构组成。拉曼峰1400cm^-1对应与弯曲面内C-C振动,拉曼峰1370cm cm^-1对应于长程无序而形成的D-线。该碳氮薄膜样品是采用微波等离子体化学气相沉积方法（MPCVD）制备而成。更多还原

【Abstract】 A Raman spectrum of carbon nitride thin film is reported in this paper. There are two Raman peaks of 1400 cm-1 and 1370 cm-1 existed in the Raman spectrum, which is different structure comparing with Raman spectra of all known carbon based materials and carbon nitride. According to X-ray diffraction analysis (XRD) and surface morphology of the film taken by scanning electron microscopy (SEM), the nitrogen containing carbon thin film could be considered to have nano-scale graphite structure with buckling of the basal planes. The Raman peak of 1400 cm-1 corresponds to C-C vibration in the basal planes. The other peak of 1370 cm"1 is attributed to disordered structure in long range. The sample of carbon nitride thin film was prepared by using macro wave plasma chemical vapor deposition (MPCVD) system.更多还原