【作者】 黄宁康； 汪德志； 杨斌； 雷家荣；

【Author】 N. K. Huang, D. Z. Wang, B.Yang, J. R. LeiInstitute of Nuclear Science and Technology, Sichuan University, Chengdu, 610064, Key Lab for Radiation Physics and Technology of Education Ministry of China

【机构】 四川大学原子核科学技术研究所；

【摘要】 采用离子束溅射沉积Zr的同时,进行氧离子的轰击。随着注入离子束流密度的不同,形成的锆氧化物薄膜从非晶向晶态转化。形成的晶态薄膜为纳米量级范围内的微晶。同时发现不同的衬底对形成纳米锆氧化物的临界氧离子束流密度也不同。更多还原

【Abstract】 The thin films of zirconium oxides could be formed with ion beam sputtering combining with oxygen ion beam bombarding. It is found that zirconium oxides formed from amorphous to crystallites are dependent on the densities of the bombarding oxygen ion beam, where the size of the crystallite is in the range of Nm particles. And the critical densities of the bombarding oxygen ion beam for the formation of the Nm particles are different from different substrate materials.更多还原