【作者】 李浩；

【导师】 周成刚；

【作者基本信息】 中国科学技术大学 ， 电子科学与技术， 2025， 硕士

【摘要】 非分光红外（Non-Dispersive Infrared,NDIR）光学气体传感技术因其分子指纹识别特性,在痕量气体检测中具有核心地位。针对现有系统因分立式光学元件导致集成度低、功耗高等瓶颈问题,本研究创新性地将超表面窄带发射器与微机电（Micro-Electro-Mechanical Systems,MEMS）加热器融合,提出无滤光片的微型化NDIR气体传感器新架构,突破传统红外气体传感器系统体积与能效限制。通过建立金属-介质-金属超表面电磁耦合模型,仿真分析了超表面结构几何参数对特征波长、吸收率及半峰全宽的调控效果。基于参数调控规律,设计了中心波长分别为4.67μm与7.35μm的完美吸收超表面结构。结合工艺容差分析,本研究成功制备了CO与SO₂超表面窄带发射器,其中心波长分别对应4.64μm与7.35μm。为了将超表面结构集成在MEMS加热器上,本研究针对MEMS加热器进行了结构优化,在加热电阻区域中心设计了平坦电阻结构以方便集成超表面结构。通过微纳加工工艺制备了窄带红外光源器件。性能测试表明:CO窄带光源在4.64μm处有发射峰,电压脉冲激励下,上升时间6.7ms、下降时间10.2ms;SO₂窄带光源在7.35μm处有发射峰,上升和下降时间分别为6.6ms与8.5ms。制备的红外光源具有良好的窄带发射特性与热响应速度。本研究设计的超表面-MEMS协同器件,其无滤光片架构显著提升了系统集成度,实验验证了器件的光谱特性与动态响应性能,为红外气体传感器的集成化发展提供了设计思路。更多还原

【Abstract】 The non-dispersive infrared（NDIR）optical gas sensing technology,leveraging its unique molecular fingerprint recognition capability,plays a pivotal role in trace gas detection.Addressing the bottlenecks of conventional systems,such as low integration and high power consumption,caused by discrete optical components,this study proposes an innovative filter-free miniaturized NDIR gas sensor architecture by integrating metasurface narrowband emitters with micro-electro-mechanical systems（MEMS）heaters.This approach effectively overcomes the limitations of traditional infrared gas sensors in terms of system volume and energy efficiency.A metal-dielectric-metal metasurface electromagnetic coupling model was established to simulate and analyze the regulatory effects of geometric parameters on characteristic wavelength,absorptivity,and full width at half maximum（FWHM）.Guided by the parameter-tuning rules,perfect absorption metasurface structures with central wavelengths of 4.67μm and 7.35μm were designed.Through process tolerance analysis,metasurface narrowband emitters for CO and SO₂were successfully fabricated,exhibiting central wavelengths of 4.64μm and 7.35μm,respectively.To enable metasurface integration on MEMS heaters,structural optimization of the MEMS heater was conducted by designing a flat resistance structure at the center of the heating resistor area to facilitate metasurface deposition.Narrowband infrared light source devices were fabricated using micro-nano processing technology.Performance tests revealed that the CO narrowband light source exhibited an emission peak at 4.64μm with a rise time of 6.7 ms and a fall time of 10.2 ms under voltage pulse excitation.The SO₂narrowband light source showed a peak at 7.35μm with rise and fall times of6.6 ms and 8.5 ms,respectively.These fabricated light sources demonstrated excellent narrowband emission characteristics and thermal response speed.The proposed metasurface-MEMS collaborative device,featuring a filter-free architecture,significantly enhances system integration.Experimental verification of its spectral characteristics and dynamic response performance provides a novel design paradigm for the integrated development of infrared gas sensors,paving the way for compact and energy-efficient gas sensing solutions.更多还原