【作者】 王浩；

【导师】 常素萍；

【作者基本信息】 华中科技大学 ， 机械工程， 2023， 硕士

【摘要】 触针式表面形貌测量系统凭借其大量程、高精度、分辨力高、抗干扰能力强的优势,是表面形貌测量领域不可替代的测量仪器。现如今我国大力发展智能制造,对表面形貌测量也提出了更高的要求。但形貌测量仪器相关的不确定度研究较少,限制了形貌测量结果可信度的进一步提升。通过对表面形貌测量系统展开误差溯源,逐个分析影响系统测量精度的主要误差因素,建立系统最终的测量不确定度模型,以补偿误差和提升测量系统的性能,有助于完善触针式表面形貌测量领域的不确定度标准。针对触针式表面形貌测量系统的主要误差因素,研究内容如下:(1)根据触针式表面形貌测量系统的测量原理,分析影响测量系统的误差来源,基于测量不确定度理论确定系统的测量不确定模型。(2)根据触针位移传感器杠杆转动的几何关系,建立传感器的非线性误差模型,采用改进粒子群算法进行非线性误差补偿,并确定非线性误差补偿截断误差;基于雅可比旋量矩阵和蒙特卡洛法确定传感器计量光路柱面光栅的位姿误差。结合光栅的位姿误差与干涉条纹的关系,得到干涉条纹的相位细分误差,进而确定传感器的计量系统误差。(3)基于多体系统理论和齐次变换矩阵,建立测量系统的空间几何误差模型,并分析几何误差对系统测量的影响,可知空间几何误差在系统测量不确定度中所占比例最大。(4)分别基于误差溯源法和量值统计法确定触针式表面形貌测量系统的不确定度,验证了不确定度分析中误差溯源法评定结果的正确性。更多还原

【Abstract】 Stylus surface topography measurement system is an irreplaceable measuring instrument in the field of surface topography measurement with its advantages of large range,high precision,high resolution and strong anti-interference ability.Nowadays,the development of intelligent manufacturing requires higher requirements for surface topography measurement.However,there are few researches on the uncertainty related to topography measuring instruments,which limits the further improvement of the reliability of topography measurement results.By tracing the error of the surface topography measurement system,the main error factors affecting the measurement accuracy of the system were analyzed one by one,and the final measurement uncertainty model of the system was established to compensate the error and improve the performance of the measurement system,which is helpful to improve the uncertainty standard in the field of stylus surface topography measurement.Aiming at the main error factors of stylus surface topography measurement system,the research contents are as follows:(1)According to the measurement principle of the stylus surface topography measurement system,the error sources affecting the measurement system were analyzed,and the measurement uncertainty model of the system was determined based on the measurement uncertainty theory.(2)According to the geometric relationship of lever rotation of the stylus displacement sensor,the nonlinear error model of the sensor was established,and the improved particle swarm optimization algorithm was used to compensate the nonlinear error,and the nonlinear error compensation truncation error was determined.Jacobi spinor matrix and Monte Carlo method are used to determine the position and pose errors of cylindrical grating in optical path measurement.Based on the relationship between the pose error and the interference fringe,the phase subdivision error of the interference fringe is obtained,and then the measurement system error of the sensor is determined.(3)Based on the theory of multi-body system and homogeneous transformation matrix,the spatial geometric error model of measurement system is established,and the influence of geometric error on measurement system is analyzed.It can be seen that the spatial geometric error occupies the largest proportion in the uncertainty of measurement system.(4)The uncertainty of stylus surface topography measurement system was determined based on error tracing method and quantitative statistics method respectively,and the correctness of the evaluation results of error tracing method in uncertainty analysis was verified.更多还原