【作者】 李钰；

【导师】 宁淑荣； 路士州；

【作者基本信息】 山东大学 ， 机械工程（专业学位）， 2023， 硕士

【摘要】 随着人们生活水平和健康等需求的不断提升以及电子科技的不断进步,柔性电子技术(Flexible Elctronic Technology)应运而生,有望掀起一场新的智能革命。柔性传感器被认为在人机交互和智能可穿戴领域具有巨大的应用潜力,柔性电容传感器的短响应时间、高灵敏度和可靠性强等特点,使其成为一种理想的传感器技术,为未来智能系统的发展和创新提供了重要支持。本文对柔性电容传感器的制备方法和制备工艺进行了详细的研究。首先,为了研究雾化压力和液体粘度对出口流量和压力的影响趋势,本研究基于现有的微喷阀建立了低压微喷涂系统并进行了系统动力学仿真。在根据微喷阀的结构进行了结构等效转换后,利用键合图理论,对两相气液入口到喷嘴出口的液路和气体系统进行了动力学建模。建模后,对喷嘴的液体管路和气体管路进行了 simulink仿真,得到了进口压力和液体粘度对出口流量和压力的影响趋势,为研究喷嘴外部流域的动态喷涂液膜形成过程提供数据参考。其次,为了实现喷嘴外部液膜的模拟,进行了微喷涂颗粒沉积和液膜形成过程的模拟。先建立和优化了喷嘴出口和外部流场的3D模型,基于对fluent两相流关键模型的理解,以先前获得的气液出口速度作为喷嘴外流域的入口条件,设置相关的模拟参数,使用Fluent动网格技术对动态喷涂过程进行了模拟,并研究了雾化压力、喷嘴高度和移动速度对动态微喷涂液膜动态特性的影响,并建立了相关数据库以指导具体液体膜参数的实现。然后,为了验证模拟结果的准确性,并通过控制电极层的宽度和厚度来达到提高软性传感器性能的目标,开展了基础实验。进行了柔性电极溶液和硅橡胶膜溶液的制备,并进行了柔性电极薄膜的微喷涂的单因素和多因素实验,得到了雾化气压、喷嘴高度和移动速度对薄膜宽度和厚度的影响趋势并得到了参数调控表以指导后续软传感器的制作。最后,为了解决在硅胶层制备、电极层制备和形成的柔性传感器表面质量方面存在的一些问题,本研究在传感器制备过程中提出了一种刮涂和微喷涂相结合的制备方法。介绍了详细的制备过程后,制备了软性传感器并测试了一些性能指标,证明了刮涂和微喷涂相结合的制备方法在传感器质量和制备效率方面的优势。更多还原

【Abstract】 With the continuous improvement of people’s living standards and health needs,as well as the continuous advancement of electronic technology,Flexible Electronic Technology has emerged and is expected to spark a new intelligent revolution.Flexible sensors are considered to have great application potential in the fields of human-computer interaction and smart wearables.The short response time,high sensitivity,and strong reliability of flexible capacitive sensors make them an ideal sensor technology,providing important support for the development and innovation of future intelligent systems.In this paper,the preparation method and preparation process of the flexible capacitive sensor are studied in detail.Firstly,in order to study the trend of the influence of atomization pressure and liquid viscosity on the outlet flow rate and pressure,this study established a low-pressure micro-spraying coating system based on the existing micro-spray valve and conducted system dynamic simulation.After the structural equivalent conversion of the micro-spray valve was carried out,the liquid and gas systems from the two-phase gas-liquid inlet to the nozzle outlet were dynamically modeled using bond graph theory.After modeling,the liquid circuit and gas circuit of the nozzle were simulated using Simulink,and the influence trend of inlet pressure and liquid viscosity on outlet flow rate and pressure was obtained,providing data reference for studying the dynamic spraying film formation process in the external flow field of the nozzle.Secondly,in order to simulate the external liquid film of the nozzle,the simulation of micro-spray particle deposition and film formation process was carried out.The 3D model of the nozzle outlet and external flow field was established and optimized.Based on the understanding of the key models of Fluent’s two-phase flow,the gas-liquid outlet velocity obtained in Chapter 2 was used as the inlet condition of the flow field,and relevant simulation parameters were set.Dynamic spraying process was simulated using Fluent’s dynamic grid technology,and the effects of atomization pressure,nozzle height and velocity on the dynamic characteristics of the dynamic micro-spraying film were studied.A relevant database was established to guide the implementation of specific film parameters.Then,in order to verify the accuracy of the simulation results and achieve the goal of improving the performance of flexible sensors by controlling the width and thickness of the electrode layer,basic experiments were carried out.The preparation of flexible electrode solution and silicone rubber film solution was carried out,and single-factor and multi-factor experiments of micro-spray coating of flexible electrode thin films were conducted.The comprehensive effects of atomization pressure,nozzle height and moving speed on film width and thickness were obtained,and a parameter adjustment table was obtained to guide the production of subsequent soft sensors.Finally,in order to solve some problems in the surface quality of flexible sensors during the preparation of the silicone gel layer,electrode layer,and formation,this study proposed a preparation method combining scraping and micro-spray coating in the sensor preparation process.After introducing the detailed preparation process,the soft sensor was prepared and some performance indicators were tested,which proved the advantages of the combination of scraping coating and micro-spraying in terms of sensor quality and preparation efficiency.更多还原