【作者】 董宇；

【导师】 常玉春；

【作者基本信息】 吉林大学 ， 集成电路工程（专业学位）， 2022， 硕士

【摘要】 二十世纪六十年代以来,在全球产业链的合作下,集成电路工程得到了发展。微通道板是一种光电器件,具有暗电流小,高时空分辨率等优点,可以用来探测微弱的光信号。微通道板可以将探测到的微弱的光信号放大成电荷云。这种信号可以被集成电路处理,获得相应的时间信息。迄今为止,还没有出现与微通道板集成在一起的专用电路芯片,所使用的都是通用的芯片,而这样会导致功耗升高,精度变低,因此寻找合适的半导体工艺技术和合适的电路方案成为了目前研究的热点。本文的主要内容是设计一款面向单光子飞行时间探测的适用于微通道板的电荷信号探测电路,包括微通道板光电探测器的介绍、模拟前端电路的设计、时间-数字转换器的设计和其误差的分析、模拟光脉冲电路的设计、整体死区时间的分析、版图的设计。主要介绍了微通道板和芯片结合的方式,讨论了时间检测电路的几种类型,前沿触发定时,恒比定时,双阈值触发定时等等,并选择了相对合适的时间检测电路。为了在带宽、增益和噪声之间做折衷和优化,选择了合适的跨阻放大器。设计了低延迟比较器,它具有较大的电压摆幅和相对较低的延迟。同时,本文提出了一种组合型高精度时间-数字转换器,详细地分析了时间-数字转换器的系统误差,并给出了相对应的解决办法。最后对整体死区时间的影响因素进行了分析。本文采用了SMIC 0.18μm的Bi CMOS工艺进行设计,包括跨阻放大器、低延迟比较器、时间-数字转换器。为了对电路进行测试,单个像元电路还集成了PWM模式的模拟光脉冲电路。单个像元面积500?m?200?m(含焊盘),在640MHz的高频时钟下,时间-数字转换器(TDC)的可实现分辨率为50ps的光子飞行时间测量。电路通过测量电荷云到达的时间和电荷量的大小,可以计算出入射到微通道板的光子飞行时间和光子数量,实现光探测。更多还原

【Abstract】 Since the 1960 s,with the cooperation of the global industrial chain,integrated circuit engineering has been developed.Microchannel plate is an optoelectronic device with the advantages of low dark current and high temporal and spatial resolution,which can be used to detect weak optical signals.The microchannel plate can amplify the detected weak light signal into a charge cloud.Such signals can be processed by integrated circuits to obtain corresponding time information.So far,there has not been an ASIC integrated with the microchannel plate and universal chips will lead to higher power consumption and lower precision.The circuit scheme has become the focus of current research.The main content of this paper is to design a charge signal detection circuit for single-photon time-of-flight detection suitable for microchannel plate,including the introduction of microchannel plate photodetector,the design of analog front-end circuit,the design of time-to-digital converter and the analysis of its systematical error,the design of the analog optical pulse circuit,the analysis of the overall dead time and the design of the layout.This paper introduces the combination of the microchannel plate and the chip,discusses types of time detection circuits,such as leading edge trigger timing,constant fraction discrimination,double threshold trigger timing.The paper selects a suitable time detection circuit.A suitable transimpedance amplifier is selected for the compromise and optimization between bandwidth,gain and noise.A low-latency comparator is designed with high voltage swing and low latency.At the same time,this paper proposes a combined high-precision time-to-digital converter.The paper analyzes the system error of the time-to-digital converter in detail and gives the corresponding solution.Finally,the influencing factors of the overall dead time are analyzed.This paper adopts SMIC 0.18μm Bi CMOS process to design,including transimpedance amplifier,low delay comparator,time-to-digital converter.To assess the circuit,the single pixel circuit also integrates an analog light pulse circuit in PWM mode.The area of a single pixel is500?m?200?m(including pads),and the time-to-digital converter(TDC)can achieve photon timeof-flight measurement with a resolution of 50 ps under a high-frequency clock of 640 MHz.By measuring the arrival time of the charge cloud and the size of the charge,the circuit can calculate the photon flight time and the number of photons incident on the microchannel plate to realize light detection.更多还原