【作者】 王健；

【导师】 万发雨； 季启政；

【作者基本信息】 南京信息工程大学 ， 信息与通信工程（专业学位）， 2020， 硕士

【摘要】 静电问题一直是工业领域(尤其是半导体领域)不可忽视的问题,随着我国电子工业的不断升级,电子元件将越来越小,越来越精密,其静电敏感度在不断升高,而且静电超敏感元件所占比例也在不断增大。因而国内必须在静电超敏感领域建立起自己的防护标准与认证体系,这不仅需要对静电起电原理进行深入的研究,还需要大量实验与数据的支撑。为此本文先从人体模型(Human Body Model,简称HBM)起电过程的原理入手,发现人体静电起电是静电电荷聚集与消散两个过程动态平衡的结果。如果人体连续不断地进行起电动作(如连续行走),人体所带静电的电荷量会趋近饱和,此时人体静电电压与人体起电率和人体对地泄漏电阻有关,人体起电率表征人体静电的聚集过程,人体泄漏电阻影响人体静电的消散过程。接着分析实际人体行走时,会对人体起电率和人体泄漏电阻产生影响的几点因素,并将这些因素列为实验参量,参照现行标准中规定的六步行走模式展开实验。实验发现:人体行走电压与人体对地电阻大致成正比例函数关系,其比例系数即为连续行走时的人体平均起电率;人体行走电压与人体对地电阻值都会随环境温度及相对湿度的增高而降低,且降低趋势较好的呈现指数函数关系;但相对湿度几乎不会影响人体行走时的起电率,而环境温度的升高会使人体行走起电率增大。为了对静电防护区内的人体起电进行控制,还分析了科研工作人员在静电防护区内的其他起电动作,如随机行走、外衣与座椅分离、抬起双脚和脱去外衣等;再将人体行走电压当作随机变量,从概率统计的角度对进行外推,预估人体在长期行走中可能达到的最大起电电压。最后依据以上两点对已有的静电防护区域进行评估与建议。更多还原

【Abstract】 The problem of static electricity has always been a problem that cannot be ignored in the industrial field(especially in the field of semiconductors).With the continuous upgrading of China’s electronics industry,electronic components will become smaller and more precise,and its electrostatic sensitivity is constantly increasing,and static electricity.The proportion of ultrasensitive components is also increasing.Therefore,China must establish its own protection standards and certification systems in the field of electrostatic super-sensitivity.This requires not only in-depth research on the principle of electrostatic charging,but also the support of a large number of experiments and data.Therefore,this article starts with the principle of the electrification process of the Human Body Model(HBM),and finds that the electrostatic charging of the human body is the result of the dynamic balance of the two processes of electrostatic charge accumulation and dissipation.If the human body continuously conducts electrification actions(such as continuous walking),the amount of static charge carried by the human body will approach saturation.At this time,the electrostatic voltage of the human body is related to the human body electrification rate and the human body ’s resistance to earth leakage.The accumulation process of human body static electricity and the leakage resistance of human body affect the dissipation process of human body static electricity.Then analyze some factors that affect the human body’s electrification rate and human body’s leakage resistance when walking,and list these factors as experimental parameters,and refer to the six-walk walking mode specified in the current standard to start the experiment.The experiment found that the walking voltage of the human body is roughly proportional to the resistance of the human body to the ground,and its proportional coefficient is the average electrification rate of the human body during continuous walking;the walking voltage of the human body and the resistance value of the human body to the ground will increase with the ambient temperature and relative humidity.The decrease,and the decrease trend is better,showing an exponential function relationship;but the relative humidity will hardly affect the electrification rate when the human body is walking,and the increase in the ambient temperature will increase the electrification rate of the human body.In order to control the electrification of the human body in the electrostatic protection zone,other electrification actions of scientific research staff in the electrostatic protection zone were also analyzed,such as random walking,separation of the coat from the seat,lifting of feet and taking off the coat,etc.;Taking the human walking voltage as a random variable,extrapolate it from the perspective of probability statistics to estimate the maximum starting voltage that the human body may reach during long-term walking.Finally,based on the above two points,the existing electrostatic protection area is evaluated and suggested.更多还原