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基于会聚光路偏振干涉面形检测系统设计

Polarization Interference Surface Detection Technology Based on Convergent Optical Path

【作者】 陈升

【导师】 王敏;

【作者基本信息】 福建师范大学 , 工程硕士(专业学位), 2018, 硕士

【摘要】 随着科技的发展时代的进步,光学产品被广泛应用于生活的方方面面,与之相对的,对光学产品的基本元件也就是光学镜片的精度要求越来越高了。为了控制好光学镜片的精度要求就需要相应的检测技术得到一定的提高。就目前来看对光学元件检测最为经典且有效的方法就是干涉检测法。目前大部分光学车间常采用的是样板法,用这种方法检测镜片面形无法对镜片进行定量检测同时还容易对镜片面形造成二次伤害,结果是由检验人员根据经验判断,容易掺杂一些主观因素从而影响检测精度。我们课题组是在普通泰曼-格林分光系统的基础上加入了偏振干涉,通过软件模拟,采集干涉图样,提高了干涉条纹的对比度。本文主要是针对平行光路无法解决的小曲率凹凸透镜镜面面形检测问题,提出了会聚光路检测凹凸透镜的镜面面形的设计方案。本文首先对干涉理论进行研究分析,然后再用会聚光光路对凸透镜的面形和凹透镜的面形这两种检测方法进行理论分析,主要是用ZEMAX软件非序列进行软件模拟分析,得到不同曲率的面形干涉图样数据。同时仪器最终要实体化所以本文也提出了一个初步的样机图样方案。本文最后对研究工作进行了相关总结,针对会聚光路的不足之处提出了改进的思路和方法,对后期实现会聚光路全面性的检测有重要意义。

【Abstract】 With the development of technology and the progress of the times,optical products have been widely applied to all aspects of life.Correspondingly,the requirements of the basic components of optical products and the accuracy of optical lenses are higher and higher.In order to control the precision of optical lens,the detection technology should be improved at the same time.As we currently know,the most classical and effective method for detecting optical elements is interference detection.At present,sample method is the most widely used method in most optical workshops.We can’t perform quantitative detection by using this method to detect lens surface and it may cause secondary damage to the surface of lenses.Finally,the result will eventually be judged by experienced staff,which is easy to adulterate some subjective factors and may affect the detection accuracy.In our research group,the polarization interference is added based on the ordinary Ting Green system.The interference pattern is collected by software simulation and construction of the experimental optical path,which improve the contrast between the interference fringe.In this paper,we proposed the design of the mirror surface shape of the concave and convex lens.which is aimed at the detection of the mirror surface of the small curvature concave and convex lens which can’t be solved by the parallel light path.In this paper,the interference theory is studied and analyzed firstly,and then the two detection methods of the convex lens surface shape and the concave lens surface shape are analyzed with the spotlight path,we mainly used the ZEMAX software non sequence software simulation analysis,and we finally building the experimental platform to get the surface shape interference pattern data with different curvature.At the same time,the instrument is ultimately materialized,so this paper also proposes a preliminary prototype plan.At the end of this paper,the research work is summarized,and the improvement ideas and methods are put forward in view of the shortcomings of the spotlight Road,which is of great significance for the later realization of the comprehensive detection of the spotlight path.

  • 【分类号】TH74
  • 【下载频次】87
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