【作者】 李明；

【导师】 陈西府；

【作者基本信息】 江苏大学 ， 机械工程（专业学位）， 2018， 硕士

【摘要】 直线压电电机以定位精度高、响应速度快、抗干扰能力强等优点在光学仪器、精密平台、航空航天等高端技术领域展现了广阔的应用前景。近年来,非共振式直线压电电机以加工要求不高、精度高、稳定性好等优点得到了很快的发展,但仍存在大行程与高精度的矛盾问题。为解决直线压电电机在大行程内高精度和稳定性好的问题,利用压电叠层输出力大、振幅大且稳定性好的优点,本课题提出了基于差动摩擦驱动原理的直线压电电机,实现了非共振状态下大行程内高精度的摩擦驱动。本文的主要研究内容和成果包括:(1)比较和分析超声电机和非共振式直线压电电机的发展趋势,分析压电叠层的电学特性和机械输出特性,为压电叠层作动系统的柔性机构的设计提供参考。(2)研究压电叠层作动系统的动态特性,根据作动系统的设计理论,以提高压电叠层的机械输出特性为目标,提出三种用于压电叠层作动系统的柔性机构。研究表明:双侧平行悬臂柔性机构更有利于保护压电叠层不被破坏,且能够更好地发挥压电叠层输出性能。(3)基于差动摩擦驱动原理,提出单足非共振摩擦驱动原理直线压电电机,并提出了一种非对称电激励方式。研究差动驱动原理电机的工作原理,提出具有输出位移解耦特性的定子驱动足,并设计单足非共振摩擦驱动型直线压电电机的结构。实验结果表明:电机可以在1Hz~400Hz频率范围内稳定运行,实现了宽频域特性;电机样机行程达200mm,位移分辨率最小为11nm,实现了大行程内高精度和稳定性好的目标。(4)基于单足直线压电电机良好的机械输出特性,提出了双足非共振摩擦驱动原理直线压电电机。实验结果表明:双足电机可以在10Hz~1200Hz频率范围内稳定运行,最大输出力达5.3N,双足电机样机的速度范围为1.03μm/s~609.6μm/s。总之,本课题提出的差动摩擦驱动原理直线压电电机机械输出特性良好,电机稳定性好,对工作环境要求较低,实现了宽频域、大行程、高精度的研究目标。更多还原

【Abstract】 Linear piezoelectric motors are widely used in the field of optical instruments,medical devices,nanotechnology and high-precision manufacturing technology due to its advantage of high precision,fast response and anti-interference ability.In recent years,the non-resonant linear piezoelectric motor has been developing rapidly in the advantages of low machining precision and high precision and good stability.However,there are still problems with the stability of large strokes and high-precision positioning.In order to solve the problem of high precision and stability in a large stroke of a linear piezoelectric motor,the linear piezoelectric motor based on friction differential drive principle.High precision friction drive technology had been achieved utilizing piezoelectric stacks with their outstanding features of large output force,large amplitude and good stability.The main contributions of this dissertation are as follows:Firstly,the research status and development trend of resonant linear motors and non-resonant linear motors are compared and analyzed.The electrical characteristics and mechanical output characteristics of piezoelectric stacks are analyzed,providing the basis for the flexible design method of piezoelectric stack actuation system.Secondly,the dynamic characteristics of piezoelectric stack system are researched.In order to improve the mechanical output characteristics of piezoelectric stacks,three flexible piezoelectric stack actuation systems is designed based on the method of the actuation system.It shows that the bilateral parallel cantilever flexible mechanism is beneficial for the protection of piezoelectric stacks and for output performance of piezoelectric stacks.Thirdly,the friction drive type non-resonant piezoelectric stack liner motor is proposed by the analysis of friction differential drive principle,then the asymmetrical voltage signal is designed.The operational principle of friction differential drive motor is researched on,and the drive foot with displacement decoupling characteristics is proposed.Further,the structure of a single foot linear piezoelectric motor is designed.Experimental results show that the motor can run steadily when the frequency varies from 1Hz to 400 Hz and realize the characteristic of wide frequency domain from the frequency response characteristic of the motor.The stroke of the motor is 200 mm,and the minimum resolution is 11 nm,which achieves the goal of high accuracy and good stability in large stroke.Finally,the biped liner piezoelectric motor is proposed because of the good mechanical output characteristics of single foot linear piezoelectric motor.Experimental results showed that the biped linear piezoelectric motor run stably when the frequency varies from 10 Hz to 1200 Hz,and the maximum thrust is 5.3N.The velocity of the motor ranges from 1.03μm/s to 609.6μm/s.All in all,the friction differential drive piezoelectric stack linear motors proposed in the paper have good mechanical output characteristics and operation stability and are almost not affected by environmental factors,which can achieve the goal of wide frequency domain,large stroke and high accuracy.更多还原