【作者】 张志；

【导师】 曾理湛；

【作者基本信息】 华中科技大学 ， 机械电子工程， 2016， 硕士

【摘要】 精密运动平台是IC制造装备的核心部件,减振系统作为精密运动平台的一个不可或缺的组成部分,为平台的平稳运行提供超静环境保障,因而其设计成为精密运动平台设计中关键的环节。随着精密运动平台的运行精度不断提高达到了纳米级别,专业仿真分析软件工具的支持成为减振系统设计的关键。由于目前尚缺乏减振系统建模、仿真分析的专用软件,本文开发了精密运动平台减振系统设计与仿真软件。本文的主要工作如下:通过对精密运动平台减振系统设计过程进行分析,发现减振系统建模存在多领域统一建模、高精度、高效率三个关键点。另外,基于文件的减振系统设计实例管理繁琐不便,用户交互性差。针对这两个关键问题,论文提出了软件的两个主要功能需求,即模板库和实例池;然后设计了软件架构和数据结构;针对软件的模板库功能需求,先对减振系统组件进行动力学特性分析,然后在基于Modelica语言的多领域统一建模平台MWorks中建立组件的动力学模型,接着对组件模型进行封装,提取动力学特征参数形成组件模板从而建立减振系统模板库。用户基于该模板库能够快速的搭建减振系统模型同时能够保证建模的高精度。针对软件的实例池功能需求,通过对减振系统设计实例的研究,探明了设计实例包含的内容,并明确了设计实例中各部分内容的关系模型。同时还研究了设计实例检索的方法,为用户查阅实例和重用实例提供了方便。完成上面的研究工作之后,基于C++Builder开发了减振系统设计与仿真软件。最后根据特定的减振系统设计指标,搭建了减振系统模型并进行仿真分析,分析结果表明该模型能够满足设计要求,以此验证了软件功能。更多还原

【Abstract】 Precision positioning stage is widely used in IC manufacturing equipment. As an indispensable part of precision positioning stage, vibration isolation system provides super quiescent environment protection for running smoothly of platform. Therefore the design of vibration system become the key part in the design of precision positioning stage. As the running accuracy of precision positioning stage enhances unceasingly to the nanometer level, support of professional simulation analysis software tool becomes the key to design of vibration isolation system. Since the lack of vibration system modeling and simulation analysis software at present. software was developed for vibration system design and simulation of precision positioning stage. The main work in this thesis is as follows:Through analyzing on design process of vibration isolation system of precision positioning stage, found that there were three key issues in modeling of vibration isolation system, namely unified modeling, high precision and high efficiency. In addition, the design instance management of vibration isolation system based on file is cumbersome, poor user interactivity. According to these two problems, this thesis puts forward two major function requirements of software, namely the template library and instance pool; And then designed the software architecture and data structure.For template library functional requirements of the software, dynamic characteristics of components in vibration isolation system were analyzed at first, then dynamics model of components are set up on MWorks which is an various fields and unified modeling platform based on the Modelica language, and the dynamic characteristic parameters are extracted. After that the components’ dynamics model are encapsulated to template and added to the template library of vibration isolation system. Based on the template library users can rapidly building vibration system model at the same time can ensure the high precision of dynamics modeling. For instance pool functional requirements of the software, through research of design cases of vibration isolation system, proved what the design cases contain, and instance pool was designed for unified management of cases. The retrieval method of design case is studied, therefore users can reuse history case conveniently.After completing the research above, software for design and simulation of vibration isolation system was developed based on C++ Builder. According to particular design requirements of vibration system, an vibration system was modeled, simulated and analyzed finally. The analysis results show that the vibration system model can meet the design requirements, which verifies the functions of software.更多还原