【作者】 刘顺；

【导师】 王又青； 李波；

【作者基本信息】 华中科技大学 ， 光学工程， 2015， 硕士

【摘要】 射频电源作为轴快流CO2激光器的激励源,是维持激光器的放电稳定及提高注入功率功率密度非常重要的一环。本文针对传统的电子管射频电源存在转换效率低、使用寿命短及体积庞大等问题,提出了一种基于新型CLASS E型功率半导体器件来开发工作频率为13.56MHz、单个射频电源模块输出功率为800W的固态射频电源,该电源具有体积小、成本低及容易扩展的特点。本论文主要内容有以下几个方面:(1)通过对激光器放电管的理论分析与计算得到了放电管的相关参数,分析了射频电源功率放大器采用不同工作状态的特点,并给出实际的选择方案。(2)结合轴快流CO2激光器对射频电源的要求选择了合适的功率放大器芯片,分析了不同电路拓扑方案的特点,根据课题要求选择合适的拓扑方案,推导了实现电路所需要的参数。采用PSpice软件对选用芯片进行了建模仿真与参数优化。(3)根据射频功率放大器驱动特点,在分析射频电源驱动设计要点,包括功率放大器的工作频率稳定性、驱动电流以及电压等要求的基础上,选择了合适的驱动芯片。并给出了整个驱动级的外围电源设计方案及相应的供电电源方案。(4)完成了对整个电源的硬件设计,包括设计要点及注意事项等。并通过对整个电源方案的试制与调试,完成了对整个射频电源设计方案的验证。更多还原

【Abstract】 Radio Frequency(RF) power supply as one kind of excitation source for Fast Axial Flow(FAF) CO2 laser, is the crucial part of the laser to maintain the stability of tube discharge and improve the injection of power density. Aiming at the problem of the traditional vacuum tube RF power supply has the weakness of short life, low conversion efficiency and large volume, based on a new type of CLASS E power semiconductor devices, this article presents an effective scheme to develop RF power supply, which can work in 13.56 MHz and single module can generate the output power of 800 watt. Also, it has the characteristics of small volume, low cost and easy to extend. This thesis mainly has the following several aspects:Firstly, this article analysis the theory of laser discharge tube and calculates the related parameters of the tube. The characteristics of the different working conditions of RF power amplifier is analyzed according to the characteristics of the different working conditions, and a practical scheme is selected.Secondly, a suitable power amplifier chip is accepted according to the actual circuit design requirement of FAF Laser and the characteristics of different topologies scheme are analyzed. An appropriate circuit topology scheme is accepted according to the actual circuit design requirement and relative circuit parameters are deduced. On this basis, PSpice is used for modeling and simulation of available corresponding amplifying chips, as well as for optimizing the design parameters.Thirdly, based on the analysis of key points of RF power driven design, including the working frequency stability of the power amplifier, drive current and voltage requirements, a suitable driver chip is chosen. Then the peripheral design scheme of the driver stage and the corresponding power supply scheme is given.At last, the total hardware design of power supply is completed, including the design key points and matters needing attention and so on. Meanwhile, through the joint debugging of the whole power supply scheme, the feasibility of the design scheme is verified.更多还原