【作者】 王晓东；

【导师】 关守平；

【作者基本信息】 东北大学 ， 控制理论与控制工程， 2014， 硕士

【摘要】 随着信息产业的兴起以及利用新能源引起的光伏发电的热潮,对优质的晶体需求大大增加,这对晶体生长环境的温度控制精度与控制性能提出了更高的要求。面对晶体生长使用的三温区晶体生长炉具有大滞后、大惯性、强耦合的特点,作为控制简单、可靠性高而在工业中获得了广泛应用的PID控制器难以获得令人满意的控制效果。针对这种现状,本文设计了一种具有神经元网络PID解耦的三温区晶体生长炉。这无论在理论上还是在实践上都具有重要的意义。针对三温区晶体生长炉控制精度的要求,以TI公司生产的DSP芯片TMS320F2812作为硬件控制核心和CCS3.3开发环境作为软件平台,进行了硬件与软件的设计与开发,实现三温区晶体生长炉温度控制系统的功能。本文设计开发了DSP下位机和人机界面(触摸屏)。DSP下位机控制部分包括：三路温度数据采集、PWM波形的产生、串口数据通信。人机界面应用程序包括：系统控制命令发送、三温区温度的实时显示、数据的转换与存储。DSP下位机和人机界面(触摸屏)完成了三温区晶体生长炉温度信号的采集与分析,满足了晶体生长过程的工艺要求。完成了系统软硬件设计之后,针对三温区晶体生长炉,从热传导机理出发,建立三温区晶体生长炉简化机理模型,并参照机理模型特点选定模型结构。利用灰箱法建立了系统的数学模型。根据三温区晶体生长炉温场分布的特点,先后利用经典PID对角线解耦算法和神经元网络PID解耦算法对控制系统进行设计。利用MATLAB对所设计的系统进行仿真,仿真结果验证了本次设计方法对多变量强耦合时变对象具有良好的解耦性能和自学习控制特性,达到了系统所要求的控制指标。更多还原

【Abstract】 With the rise of the information industry and the warm trend for the PV power generation by new energies, it has great demand to the big crystals with high quality, and this means higher requirements should be made to precisely control the temperature in which the crystal grows. Due to the characteristics that the three-zones crystal growth furnace has large delay and great inertia and strong coupling for the crystal growth, the PID controller, which has been commonly used in the industry due to its simple control and higher reliabilities, cannot achieve the satisfactory controlling effects. In view of this situation,This paper designs a kind of neural network PID decoupling of the three-zones crystal growth furnace.Therefore, this has great significances both in theory and practice.For the requirements of three-zones crystal growth furnace control accuracy,the paper uses the DSP chip TMS320F2812, which was made by TI company, as the hardware control core and CCS3.3 development environment as the software platform for both hardware and software design and development to achieve the three-zones crystal growth furnace control system functions. This paper has designed DSP lower machine and human-computer interface(touch screen). DSP lower machine control parts include:Three way temperature data collection, The generation of PWM waveform,serial data communication. Human-machine interface applications include: system control commands sending, three-zones temperature real-time display, data conversion and storage. DSP lower machine and man-machine interface (touch screen) complete temperature signal acquisition and analysis of three-zones crystal growth furnace and meet the technical requirements of the crystal growth process.After completing the system software and hardware design, in view of the three-zones crystal growth furnace and starting from the mechanism of heat conduction, establish simple mechanism model of the three-zones crystal growth furnace, and select model structure with reference to mechanism model characteristics. Grey box method is used to establish the system mathematical model. According to the three-zones crystal growth furnace temperature field distribution characteristics, design the control system with classic PID diagonal decoupling algorithm and neural network PID decoupling algorithm successively. Simulate the designed system with MATLAB, and the simulation result validated the design method has a good decoupling and self-learning control performance of multivariable strong coupling and time-varying objects, reached the requirement of the system control indicators.更多还原