自动物料搬送系统（AMHS）在晶圆制造中的应用及效率改善

【作者】 严峻；

【导师】 姜国宝； 黄连泉；

【作者基本信息】 复旦大学 ， 集成电路工程（专业学位）， 2013， 硕士

【摘要】 近几年来半导体产业蓬勃发展,技术的飞速发展也对半导体晶圆代工厂提出的更高的要求,如何提高生产效率的问题就摆在了我们的眼前。自动物料搬送系统AMHS(Automatic Material Handling System)在半导体制造过程中将扮演非常重要的角色,当然AMHS应用不仅仅局限在半导体晶圆厂的应用,它适用很多领域,但范围最广的还是在半导体晶圆代工厂。之所以晶圆厂会大规模的采用AMHS,基本上是基于它可以快速准确的将Carrier搬送到目的地,较少wafer的idle time,减少MO(miss operation),提高生产效率。本人所在的公司是一家半导体晶圆代工企业,采用AMHS系统为半导体晶圆代工辅助生产。本人主要负责AMHS系统的管理和维护,有多年的系统分析经验。本文主要通过探讨AMHS系统当前在半导体晶圆代工厂中的应用,特别是对无尘室的布局,AMHS的结构,性能指标和影响因素的研究分析,针对不同的问题点结合实际工作中遇到的情况,提出理论改善并进行实际操作,统计对比前后的参数,达到提高改善的效果。本论文的长远意义在于,希望能协助AMHS系统的制造厂家以及AMHS系统的应用厂家在各自的生产过程中,能够从中获得一些启示,优化设计结构,在发生类似的问题的时候可以迅速的找到解决方向,而不必要走太多的弯路；或者可以根据论文的论述的影响因素,无论是从系统的设计阶段,到生产阶段,还是在客户端的使用情况,都可以采取一定的预防措施,从而可以使AMHS系统能够发挥更大的作用,提高整个晶圆代工厂的效率。更多还原

【Abstract】 In recent years the semiconductor industry to flourish, the rapid development of technology of semiconductor wafer foundry put forward higher request, how to improve the production efficiency of the issue to be placed before us. Automatic Material Handling System in a semiconductor manufacturing process will play a very important role, of course, AMHS application is not limited in the semiconductor wafer foundry, it applies to many fields, but the most in semiconductor wafer foundry. Why the Foundry most use the AMHS, is based on it can quickly and accurately move the Carrier to the destination, less in wafer idle time, reduce MO (miss operation), raise production efficiency.The company is a semiconductor wafer foundry enterprise, we use the AMHS system for semiconductor wafer foundry auxiliary production. I am mainly responsible for AMHS system management and maintenance, many years of experience in system analysis. This topic mainly through the study of current AMHS system in semiconductor wafer foundry applications, especially for clean room layout, the structure of AMHS, performance index and influencing factors analysis, according to the different problems combined with the actual work situations, we put forward the theory of improvement and the actual operation, the statistical the parameters of before and after, achieve improvement effect.The long-term signification of this topic is that hope of assisting in the production of AMHS manufacturers and AMHS user to obtain some enlightenment and optimize the design of the structure, When they facing the similar problems, they can find the solutions and solve them in a short time. According to the factors discussed under this topic, from the system design stage, through the stage of production to in the use of the client, they can take some preventive measures, which can make the AMHS system can play a greater role, improve the efficiency of the wafer factory.更多还原