【作者】 徐栋；

【导师】 王友林；

【作者基本信息】 山东理工大学 ， 机械工程， 2014， 硕士

【摘要】 温度场移动式数控高精密晶体生长炉是晶体生长的关键设备，本文介绍了温度场移动式晶体生长炉设备的原理和优缺点,并且介绍了国内外的研究成果,对不同工艺参数——旋转磁场、坩埚传动轴正反转旋转、重力、生长速度、加热炉内温度梯度等对温度场移动式晶体生长的影响进行了讨论,提出了提高温度场移动式晶体生长质量的设想,并就未来温度场移动式晶体生长炉设备的研究方式与发展的趋势提出自己的观点。1.介绍了加热炉结构对晶体生长的影响。炉膛温度梯度的变化明显影响对流场的形态和强度，提高晶体生长的质量。研究出了一套带温度梯度的加热炉装备，并内置旋转磁场。2.介绍了温度场移动式晶体生长炉坩埚传动轴高精度旋转夹具的结构及工作原理，对现有的几种坩埚传动轴旋转夹具进行了分析研究，并从定位原理，对不同直径尺寸坩埚传动轴装夹的通用性及坩埚的跳动误差等方面进行了详细分析，研究出一套两同轴安装的三爪卡盘组成的坩埚传动轴高精度旋转夹具，提高了定位精度。通过实验测定坩埚传动轴的跳动误差，误差值大幅减小，提高了坩埚传动轴旋转精度。3.介绍了温度场超低速升降装置的结构及工作原理，研究提出由于晶体生长机理决定了温度场移动式晶体生长速度非常缓慢。温度场升降装置要求长时间超低速运行，针对运动系统的振动、摩擦、爬行等对升降运动的稳定性的影响机理，采用交流伺服控制技术对温度场升降装置进行了改进设计，研究了一套超大减速比传动的伺服装置，并对其精度进行了综合分析。实验数据表明，该装置运行精度高，稳定性好，满足温度场移动式晶体生长的要求。4.介绍了晶体生长炉控制系统的组成及MCGS软件在晶体生长炉系统中的应用。晶体生长炉控制系统中上位机采用MCGS，下位机采用PLC控制。人机界面的设计主要通过MCGS编程来完成，并实现了对晶体生长过程的实时监控。更多还原

【Abstract】 Travelling heater method(THM) precision CNC crystal growth furnaces is thekey equipment for crystal growth．The basic principles of crystal growth by thetravelling heater method, and it’s advantage and disadvantage is introduced. Thelatest progress is also introduced. The influences of different process parametersare discussed on crystal quality prepared by travelling heater method. Acceler atedcruciblero tation technique, gravit at ionalfield, grow thvelocity,temperature andso on. Views on how to increase crystal grow thvelocity, the research methods anddevelopment tendency of travelling heater method in future are also givenintroduced.1. The effects of the travelling heater method precision CNC crystal growthfurnace temperature gradients is introduced. The results showed that temperaturegradient can change the pattern.2. The basic principles of crystal growth seed rod precision fixture.And makethe latest seed rod fixtures analyzed. The influence of differents processparameters is analyzed, such as radial circular run,different diameter, registering,and so on. Test had proved it’s properties to be stable and it’s operations to bedependable.3. Due to travelling heater method precision CNC crystal growth furnacescould decide its slow growth speed，so lifting device is required to operate undertheultra－low speed situation chronically．According to shock，shake，fraction andcrawl of movement system,scheme carries out a nobel design to lifting servodriver and its precision is introduced. Meanwhile，the design system makesuse ofcommon spare parts and can meet the requirements for large scaleindustrialization．4. The structure,functions and the application of MCGS is introduced. Thehost computer control system adopts MCGS configuration software in embeddedversion, and the slave system uses PLC. Crystal growth furnaces is designed usingMCGS. The communication between the MCGS and PLC is realized with thedevice window.更多还原