【作者】 张伟；

【导师】 李明宇；

【作者基本信息】 浙江大学 ， 光学工程， 2014， 硕士

【摘要】 随着社会经济的高速发展,人们的生活水平大幅提高,对生活品质的追求渐渐成为主流。而科学技术特别是在传感技术、生物技术的高度发展,也使人们对生活品质的追求变得更为现实与迫切。及时有效地开展重大疾病监控、环境保护、食品安全工作已刻不容缓,而生物传感技术已经在疾病检测、临床诊断、环境监控、食品检测上获得了广泛的应用。表面等离子共振(Surface Plasmon Resonance, SPR)传感器由于其免标记、高灵敏度、成本低、可以实时实地检测等优点,在生物传感领域具有很大的应用价值。本课题旨在研究一种高灵敏度的基于SOI材料的平面波导型表面等离子体共振传感器,它有别于目前商用的基于棱镜耦合的SPR传感器,具有更小的体积、更高的集成度。本文提出的平面波导表面等离子体传感器使用材料SOI (Silicon-on-insulator)来实现,研究了工作波长在1550nm波段的传感器。利用刻蚀面或解离端面作为反射端面,将传统的棱镜式结构移植到波导结构中,将检测简单化,真正地完成了实时检测。本文通过传输矩阵、FDTD理论对器件的波导结构、布局设计等进行了理论的仿真和优化,通过参数的优化,探测的灵敏度理论上可以达到22.4°/RIU。当设计出射阵列波导间的角度间隔为0.135。时,该器件的探测极限可以到达6.0×10-3RIU。本文还对SOI的表面等离子体共振传感器的制作工艺进行了研究,包括整个芯片制作过程中的半导体工艺,芯片侧壁的金属溅射工艺等。更多还原

【Abstract】 As the rapid social and economic development, people’s living standards improve greatly, the persuit of high quality of life becomes general. The science and technology especially sensor technology and biotechnology develop rapidly which make the persuit of high quality of life more realistic and urgent. The work of disease surveillance, environmental protection, food safety has become essential, while bio-sensing technology has been widely used in the detection of diseases, clinical diagnostics, environmental monitoring, food testing.The character of surface plasmon resonance (SPR) sensor such as label-free, high sensitivity, low cost, real-time and real-field testing make it very usefull in the field of bio-sensing.This paper aims to study a SOI-based planar waveguide surface plasmon resonance sensor with high sensitivity. It is different from the commercial SPR sensors using attenuated total reflection optical prism couplers, because it has a smaller size and higher levels of integration.A planar waveguide surface plasmon sensor in SOI (Silicon-on-insulator) has be proposed, we study biosensors which operate at the wavelength of1550nm. We use the etching face or the end face as the mirror, transplant the principle of prism-coupled SPR sensor to work well in planar configuration. We simplify the detection, and do the real-time detection.Through the transfer matrix, FDTD theory, we simulate and optimize the waveguide device structure and layout design. After optimizing the parameters, the detection sensitivity can reach22.4°/RIU theoretically. If we set the angle between the the waveguide array as0.135°, the detection limit of the device can reach6.0×10-3RIU.We also study the semiconductor process which can be used in the fabrication of SOI surface plasmon resonance sensor including the entire production process of the semiconductor chip and the chip sidewall metal sputtering processes.更多还原