【作者】 王群；

【导师】 张卫平；

【作者基本信息】 上海交通大学 ， 微电子学与固体电子学， 2012， 硕士

【摘要】 大多数生物粒子（如细胞）具有弱反磁性，当反磁性物质处在顺磁性溶液中，并施加磁场时，会受到磁场给它的反磁力和溶液给它的反磁浮力。当粒子所受反磁力、反磁浮力、浮力与重力平衡时，粒子可以稳定悬浮。本文利用大多数生物体自身的反磁特性，结合MEMS技术，利用磁阿基米德效应，以独特的“反磁势阱钳”实现生物粒子芯片内的俘获和操纵。本文介绍了一种高效和方便的悬浮和操纵反磁粒子的方法，其中用到线圈阵列和软磁材料来产生磁场。此方法结合MEMS技术，制备了一种线圈阵列芯片。并对该微操纵技术的实现原理、相应芯片的实现工艺及相应的控制电路作了详细阐述。通过实验证明，基于MEMS的反磁微操纵技术完全可以实现生物粒子的收集、分离等微操纵，且具有自己独特的优势，有望成为一种新型的微操纵技术。更多还原

【Abstract】 Most of the particles, such as cells, have weak diamagnetic propertiesin nature world. When these diamagnetic materials are exposed toparamagnetic ambient and magnetic field is applied, they will take4forcesincluding diamagnetic force, gravity, diamagnetic buoyancy, andArchimedean buoyancy. The beads can be stabilized suspension at a point inspace where the four forces achieve balance. Based on themagneto-Archimedes effect, This article utilizes the diamagnetic propertiesof most natural materials, combined with MEMS technology, to achieve thecapture and manipulation of the biological particles in chips with the unique"anti-magnetic tweezers trap".An efficient and convenient way to levitate and manipulate micro beadsis reported, in which coils and soft magnetic materials are used to generate amagnetic field. The levitation is based on diamagnetic buoyancy, and themain structure of this device is made into spiral switch arrays so as to simplify the interconnection and magnetic field control. The design,modeling, fabrication of the device for diamagnetic beads manipulation andthe control system is given in detail.Experiments show that the anti-magnetic micro-manipulationtechniques based on MEMS can achieve the micro-manipulation of thebiological particles, such as collection, separation, and has its own uniqueadvantages, is expected to become a new type of micro-manipulationtechniques.更多还原