【作者】 熊俊；

【导师】 陈学东；

【作者基本信息】 华中科技大学 ， 机械工程， 2012， 硕士

【摘要】 主动减振系统是精密制造、测量装备实现精度生成的必要保障，精密减振系统要处理的微振动具有频带宽、微幅值、来源复杂的特点，给精密减振系统的结构设计和控制设计提出了巨大挑战。被动隔振单元元件与传感器、作动器结合可以构成主动减振装置，但受限于传感器、作动器的体积，对于需要微幅精密减振的小型设备而言，这种主动减振装置结构复杂，体积较大。因此，对于需要进行微幅振动抑制的小质量精密设备，设计一种结构紧凑、集成度高的精密主动减振装置具有重要的实用意义。本文在分析了压电材料性能的基础上，将压电陶瓷作为主动减振元件，根据主动减振所要求达到的目标，设计并制作完成了具有较高集成度的压电块结构。提出了系统机械结构一体化设计与加工的理念，针对系统被动隔振及主动减振的要求，分别对主动减振与被动隔振单元核心部分进行机械结构设计，通过有限元分析验证结构的可靠性。搭建减振系统平台，设计实验方案，进行系统平台模态测试及系统被动隔振传递率测试，分析系统相关性能。更多还原

【Abstract】 Active vibration control system is the necessary guarantee for the generation ofprecision in precision manufacturing and metrology equipment. The micro-vibrationneeding to be overcome in precision vibration isolation system has the characteristics ofbroadband, slight value and complex source. All of these posed tremendous challenges onthe structure design and active control of precision vibration isolation system. Passivevibration isolation unit and sensors, actuators can be combined to form an active vibrationcontrol device. However, due to the size of sensor and actuator, this active vibration controldevice is too big to meet the needs of micro precision vibration damping for smallequipment. Therefore, it is necessary to design a compact and highly integrated precisionactive vibration damping device.Base on the analysis of piezoelectric material performance, this article takes thepiezoelectric ceramics as the active vibration damping element. According to therequirements of active vibration damping, a piezoelectric block structure with high-levelintegration has been designed and made.Propose the concept of integration of the system mechanical structure design andprocessing. According to the requirement of passive vibration isolation and active vibrationdamping, the mechanical structure design of passive and active part has been carried onrespectively. Use FEA to verify the reliability of the structure.Build test platform and design the plan to carry on the experiment of the systemplatform. Modal test and passive isolation transfer ratio test have been taking to analysis theperformance of the system.更多还原