【作者】 梁平；

【导师】 干蜀毅；

【作者基本信息】 合肥工业大学 ， 流体机械及工程， 2011， 硕士

【摘要】 真空计量器具广泛应用于工业加工和科学实验领域，其种类繁多，样式各异。由于使用中的真空计大多数都是间接测量真空度的，因此需要对这些真空计进行校准，以检定其是否能准确显示。安徽省真空计量站的建立不仅可以满足学校自身科学研究的需求，还可以为邻近的华东、华中真空相关企业提供良好的服务平台。本文主要介绍安徽省真空计量站建设的前期准备工作，内容包括计量站仪器更新、系统搭建、系统预抽、系统检漏、真空室烘烤等。通过电容薄膜规比对实验、副标准真空计比对实验和静态膨胀法实验，在104～10-4Pa范围内对待校准真空计进行了宽量程校准，从而从硬件构建和软件调试两方面保证系统具备真空校准检定能力。真空传感器都有测量上、下限，而实际应用中可能需要从大气压一直测到高真空，因此，宽量程真空计一直是研究开发的热点。本文研制了一种采用热偶规和电离规复合形式的宽量程真空计，低真空、高真空信号分别由热偶规、电离规采集，真空规及其量程切换由电控处理系统自动完成，可测真空范围为105～10-5Pa。电控处理系统由飞思卡尔MC9S12系列16位单片机MC9S12DG128为主干搭建。真空规输出的微小采样信号经放大电路和A/D转换后输入单片机，通过数据的分析判断，电控系统自动切换传感器、量程，并将数据转换成显示码，在LED数码管或LCD液晶显示板上显示。论文最后对真空计的发展趋势做了一定的展望。更多还原

【Abstract】 Vacuum measuring instruments were widely used in the field of relatedindustrial processes and scientific experiments. As many vacuum gaugesmeasurement were made indirectly, the calibration of them is of great importance.This paper describes the preparative work of the construction of Anhui vacuummetering station, including equipment selection or updating, system construction,testing and leak detection. By means of membrane capacitance gauge, referencegauge and static expansion method, the system was supposed to be able to calibrategauges in a wide range from104to10-4Pa. The successful construction of Anhuivacuum metering station can serve not only our own scientific research projects,but also adjacent vacuum-related business.Every vacuum gauge head has its own measurement limit. To meet the need ofwide range measurement from atmospheric pressure to high vacuum, which is oftenrequired in many applications, a great deal of attention was paied to the researchand development of wide-range vacuum gauges. This paper also developed awide-range vaccum measuring instrument of complex vacuum gauges containing aionization gauge and a thermocouple gauge. Its measurment range is105~10-5Pa.Low and high vacuum signal was acquired by a thermocouple gauge and aionization gauge respectively. A electronic control system, mainly composed of thecore processing chip of Freescale16-bit microcontroller MC9S12DG128, canswitch between the two gauges automatically according the vaccum degree beingmeasured. The tiny signal acquired by the vacuum gauge head is amplified,converted into digital, and then displayed in LED or LCD. The paper also givessome idea about the development trend of vacuum gauges.更多还原