【作者】 周晓琴；

【导师】 徐龙权；

【作者基本信息】 南昌大学 ， 电机与电器， 2012， 硕士

【摘要】 以GaN为代表的第三代宽禁带化合物半导体材料因其显著优点是目前世界上最先进的半导体材料,广泛应用于蓝、绿光发光器件领域。MOCVD技术是当前唯一能够大规模生产GaN系外延薄膜材料圆片的技术。迄今为止,MOCVD技术在国外已相当成熟,而我国的生产型MOCVD设备目前来说还是空白,主要依赖进口,价格十分昂贵,严重制约了我国半导体材料的发展。因此,本课题不仅迫在眉睫,而且有着重大的现实意义。本文的MOCVD采用FCS控制系统,以“上位机+下位机+现场设备”三层控制模式实现：上位机监控软件用于实现工艺编辑、实时监控以及生长曲线绘制等功能；下位机PLC完成所有模拟量、数字量的监控和控制,并通过工业以太网与上位机通讯,通过设备网与现场智能仪表通讯；现场智能仪表为最底层控制设备,用于实现PLC下达的控制指令。本文的MOCVD选用Allen-Bradley Logix系列控制器作为核心控制器。采用Delphi7开发平台完成上位机监控软件设计,下位机程序文件由RSLogix5000编程软件和STEP7-Micro/WIN V4.0编程软件完成。采用OPC通讯协议,以RSLinx为桥梁,构建了工业以太网和设备网高效可靠的通讯渠道。本文的37片MOCVD设备经调试后,已投入试运行,设备目前运行良好,材料生长稳定,材料性能和设备技术指标均达市场要求。更多还原

【Abstract】 As a representative of the third generation semiconductor material, GaN is the most advanced semiconductor materials all over the world, widely used in blue, green light shining field. The MOCVD is used to the growth of GaN and is the unique technology of GaN’s large-scale production. As far as now, the MOCVD in foreign is relatively mature, while our country is still blank It mainly depends on imports and the price is very expensive, which seriously restricts the development of semiconductor materials in China.Therefore, the design of the MOCVD equipment is urgency. and has great realistic meaning.This paper used the FCS control system, with three layers control:"PC+PLC+device". To achieve it:the software in PC is used to complete the real-time monitoring and the control of all; The PLC is used to complete monitoring and control of all analog and digital. The PLC communicates with PC through Ethernet/IP and communicates with the device by the DeviceNet; The device at the bottom of the control is used to finish the control commands from PLC.In this paper, the AB’s PLC was selected as the main controller. The software in the PC was designed by Delphi7, and the software of PLC was completed by RSLogix5000and STEP7-Micro/WIN V4.0. At last, the Ethernet/IP and DeviceNet were covered by OPC and RSLinx.The37piece MOCVD has been put into production, and successful produced GaN At present,the device is running well, material growth stability, the material properties and technology indexes all reached market requirements.更多还原