【作者】 周琼；

【导师】 修吉平；

【作者基本信息】 华中科技大学 ， 材料加工工程， 2009， 硕士

【摘要】 空气流量传感器是汽车电子控制燃油喷射装置中决定系统控制精度的重要部件之一，又称空气流量计。它是汽车电子配件中两个尚未能实现国产化的部件之一。研制热式气体质量流量传感器芯片，目的就是通过实验，掌握厚膜电路工艺，以期可以制作出性能优良的产品来取代进口产品，实现国有化。本课题研究的汽车空气质量流量计综合分析各种工艺与技术，详尽地阐述了传感器工作的原理。采用厚膜电路工艺制作热膜式气体流量传感器，本文重点放在热式气体流量计传感器芯片的研制上。从芯片的结构和电路设计、热敏电阻材料和导电银浆的选取、热敏电阻结构设计和制备、烧结工艺对热敏电阻的影响和低热导基板材料的研制等方面进行了详尽的理论分析和反复的实践验证。论文对两种结构进行了实验对比：一是一体式结构；二是分体式结构。实验发现，设计一体式结构比分体式结构有更好的结构稳定性，但基板材料的导热能力在热影响方面存在着较大问题。而采用分体式结构大大减弱了发热电阻的热影响，且响应速度高，灵敏度好。测量精度完全达到了要求，却在结构稳定性方面存在一定问题。对于车用空气流量传感器的研制不仅在拥有独立自主知识产权的方面，更在能源节约与环境保护方面有着尤为重要的意义。更多还原

【Abstract】 Air -mass meter, is an important part in the automobile electronic-control fuelinjection installment which determines the precision of system control. It is one of the twoelectronic components which haven’t been realized manufacture domestically. The reasonfor the research of the thermal gas mass flow sensor chip is to master the process of thethick-film circuit through a series of experiment, in order to produce a good performanceproduce to replace the imported products achieving its nationalization.The air-mass sensor, generalized analysis each craft and the technology we havedevised, has elaborated the sensor’s working principle exhaustively. In this paper, wefocus on the research of the thermal gas mass flow sensor chip utilizing the thick-filmcircuit craft to manufacture the hot film type air mass sensor, which could be illustrated asfollowing points: the design of the chip’s structure and the circuit, the selection of PTCthermistor and the conduction, design and preparation of PTC thermistor structure, theexhaustive theoretical analysis and various experiment of the agglutination craft’influenceto the thermistor and the development of low heat conductivity plate.In this article, we compared the experiment of the two the structure: the first isall-in-one structure; the second is split-type structure. It was found that the design of thestructure of all-in-one is better than the split structure in the stability of the structure, butthere are still some problems in the thermal conductivity of substrate material impact onthe ability to heat. Besides, split-type structure could reduce the thermal effects of heatresistance, and has high speed in response, good sensitivity. Measurement accuracy hasexactly met requirements, although there are certain problems in the stability of thestructure.The research on the air-mass sensor not only has the independent intellectual propertyrights, but has the signification in energy conservation and the environmental protection.更多还原