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太赫兹波段多谐振Metamaterial器件的研究与设计
【作者】 凌伟；
【导师】 刘盛纲；
【作者基本信息】 电子科技大学 ， 光学， 2011， 硕士
【摘要】 太赫兹(Terahertz, THz)波(或称THz辐射、T-射线、亚毫米波、远红外)通常指频率介于0.1THz～10THz(波长为3mm～30～μm,波数为3.3cm-1～333cm-1)范围内的电磁辐射,对应的能量范围在0.04～4kJ/mol之间。太赫兹波具有众多独特的优点,同时太赫兹源和探测器也已得到了极大的发展,但是,要使太赫兹波得到更为广泛而普遍的应用,一系列该波段无源器件的设计与实现是必要的前提,例如：太赫兹波传输过程中需要的太赫兹滤波器,调制器,开关等；近年来,一个快速发展的领域为这些器件的实现提供了新的思路,这就是Metamaterial。到目前为止,由于样品制作及测试的简易性,各国研究人员研究的较为深入的是微波段Metamaterial,近几年,由于发展太赫兹科学与技术的迫切需要,同时由于太赫兹实验技术的不断提高,人们对太赫兹波段Metamaterial也展开了较为广泛的研究；目前,虽然已经取得了一定的成果,例如单谐振太赫兹开关与调制器等,但是,太赫兹Metamaterial的研究还在深入之中,其中,从2004年至今多谐振Metamaterial结构的提出和改进,促进了太赫兹科学技术的进一步发展。对太赫兹多谐振Metamaterial结构的研究,一方面可以补充完善人们关于Metamaterial的认识,另一方面,对多谐振结构的研究设计可以为THz多通带滤波器以及多通带调制器等太赫兹波段器件的研究奠定一定的基础。本论文主要的研究内容和所得成果如下：1.本文使用等效电路模型理论方法对一种对称型双谐振Metamaterial的电磁特性进行了详细的研究与分析,得到了结构参数变化对双谐振Metamaterial器件谐振特性影响的一般规律。2.本文通过全波电磁仿真研究,设计得到对称双谐振Metamaterial结构(SDM)、非对称双谐振Metamaterial结构(ADM)、对称三谐振Metamaterial结构(STM)以及非对称三谐振Metamaterial结构(ATM)四种工作于太赫兹频段的平面型电响应多谐振Metamaterial结构器件。3.本文在双谐振和三谐振Metamaterial结构器件分析研究的基础上,设计得到平面型太赫兹电响应四谐振Metamaterial结构器件。同时,对一种互补型双谐振Metamaterial结构进行了分析对比研究。4.本文对太赫兹频段多谐振Metamaterial结构器件的制作工艺流程方法进行了实验研究与探索,并对加工制作中遇到的各类问题与解决方法进行了分析研究；在此基础上,成功加工制作出对称双谐振Metamaterial结构(SDM)、非对称双谐振Metamaterial结构(ADM)、对称三谐振Metamaterial结构(STM)以及非对称三谐振Metamaterial结构(ATM)四种工作于太赫兹频段的平面型电响应多谐振Metamaterial结构器件。5.本文使用电子科技大学太赫兹研究中心太赫兹时域光谱系统(THz-TDS)对所加工制作的四种多谐振Metamaterial样品进行了测试与数据处理,所得结果与电磁仿真研究结果符合较好,证实了所加工制作Metamaterial结构的精确性以及所采用的制作方法和工艺参数的可靠性。
【Abstract】 Terahertz waves (THz radiation, T-Ray, sub-millimeter wave, far-infrared ray) refer to the electromagnetic radiation with the frequency range of 0.1 THz to lOTHz (wavelength range of 3mm to 30μm, wave number 3.3cm-1 to 333cm-1); corresponding energy range is between 0.04kJ/mol and 4kJ/mol. Although terahertz wave has many unique strong points and the sources and detectors has been improved greatly, it has to develop many kinds of passive devices (e.g. terahertz filters, modulators, switches, etc) before it’s used widely. There is a research area that develops quickly in recent years, namely Metamaterial, gives a brand-new idea to realize those devices.So far, researchers all over the world have studied Metamaterial working in microwave band thoroughly, due to the simplicity of development and measurement. Recently, one began to investigate Metamaterial working in terahertz band out of the reasons that it’s urgent for developing THz science and THz experiment technology has been improved greatly. Nowadays, researchers have developed some devices such as one resonant THz switches and modulators, but it’s still moving on. Especially, terahertz multi-resonant Metamaterial first brought forward in 2004 accelerates the development of THz science and technology.The research of THz multi-resonant Metamaterial both reinforce one’s idea about Metamaterial and make indispensable preparation for terahertz multi-resonant filters, modulators, switches, etc.The following results have been achieved in this thesis:1. The electromagnetic characteristics of a basic symmetric dual-resonant Metamaterial unit are studied thoroughly based on equivalent circuit theory method. Grounded on that, the relationship between structure parameters and resonant characteristics of Metamaterial is found.2. Given great efforts, four kinds of planar terahertz electric-response multi-resonant Metamaterial structures, namely symmetric dual-resonant Metamaterial (SDM), asymmetric dual-resonant Metamaterial (ADM), symmetric triple-resonant Metamaterial (STM) and asymmetric triple-resonant Metamaterial (ATM), have been designed and optimized.3. Based on the design and analysis of dual-resonant and triple-resonant Metamaterial structures, a planar terahertz electric-response fourfold Metamaterial structure that has four resonant points in transmission curve has been designed and optimized. Besides, the electromagnetic characteristics of a dual-resonant complimentary Metamaterial structure were analyzed.4. Techniques and procedures of making terahertz multi-resonant Metamaterial samples are explored experimentally. Problems and corresponding solutions of making Metamaterial samples were analyzed too. Grounded on that, four kinds of planar terahertz electric-response multi-resonant Metamaterial structures, namely symmetric dual-resonant Metamaterial (SDM), asymmetric dual-resonant Metamaterial (ADM), symmetric triple-resonant Metamaterial (STM) and asymmetric triple-resonant Metamaterial (ATM), have been made successfully.5. The four kinds of processed Metamaterial samples were measured by THz-TDS system in the terahertz research center of UESTC. The results show good agreement of transmission characteristics between simulated Metamaterial structures and manufactured Metamaterial structures, which proved the feasibility and reliability of the techniques and parameters.