【作者】 王海燕；

【导师】 傅新； 邹俊；

【作者基本信息】 浙江大学 ， 机械电子工程， 2010， 硕士

【摘要】 微机械电子系统(MEMS)是集微型传感器、微型机构、微型执行器以及信号处理和控制电路等于一体的微型系统,其特点可归结为体积小、质量轻、功耗低。微马达是微机械电子系统重要的执行器件之一,对整个系统的性能有举足轻重的影响。目前虽已有电磁、静电、压电、超声等多种驱动形式的微马达问世,但不免有其各自的缺点。近几年,一种百年前就被发现但一直认识不足的一种驱动方法-电水动力越来越受到各国科学家的关注,并将其应用到微泵、生物粒子分离芯片等各个领域。目前,国际对电水动力微泵的研究较多,对电水动力微马达的研究甚少,而国内研究对电水动力微泵、微马达的研究尚属空白。电水动力微马达的具有结构简单、可动部件很少、能量密度大、尺寸可以做到很小且成本低等优点,对其进行研究具有很大的理论与现实价值。基于上述原因,本课题在理论、仿真、实验方面对电水动力微马达进行了初步的研究与探索,为后续工作的展开奠定了基础。本文共分六章进行阐述。第一章介绍了微机械电子系统这一大背景的研究现状,分析了电水动力驱动的微泵、微马达研究现状,阐明了电水动力微马达的研究目标及研究内容。第二章详细研究了电水动力驱动理论,包括直流电场下的电水动力-电体积力和交流电场下的电水动力-交流动电。本章对它们的各种作用形式和机理进行了深入的探讨。第三章对直流和交流电压作用下的各种电极结构的电场和力场进行了仿真和对比分析,增进了对电水动力理论的认识,弥补了实验的限制于与不足,得出了一系列有助于指导实验台设计的结论。第四章根据理论及仿真设计制作了交流电场作用下的电水动力微马达和直流电场作用下的其他实验装置。其中,对交流电场作用下的电水动力微马达设计了六种电极结构并选取了包括液晶在内四种液体以对其进行详细的对比研究。第五章对实验流程、实验现象和实验结果进行了叙述和分析。从实验中可以发现小齿轮转子启动时的不稳定性等现象,而对实验结果的对比与分析可得出电压、液体、电极内径和电极个数与交流电场作用下电水动力微马达输出转速的关系。第六章对已做的工作进行了总结,对下一步的工作进行了展望。更多还原

【Abstract】 Micro-Electro-Mechanical Systems (MEMS) is a micro system that including micro sensor, micro machine, micro actuator and signal processing and controlling, it is characterized by its small shape, light weight and low power consumption. Micro motor is an important actuator of MEMS, and it has a major impact on the whole system. Though there are several kinds of micro motors such as electromagnetic, electrostatic, piezoelectric and ultrasound micro motors currently, they all have their own limits. In recent years, an old driving method called electrohydrodynamics that has been discovered for a hundred years but not well understood attracted the attention of scientists, and they applied it to several fields including micro pumps and bio- particle separation chips. Now, there is a lot of research on micro pumps but little on micro motors overseas, and there is no research on both in our country. Electrohydrodynamic motor has advantages of simple structure, a few moving parts, greater energy density, small size and low cost. For the above reasons, we made a preliminary research on the electrohydrodynamic motor in theoretical, experimental and simulating work, and this laid the foundation for further work. We will describe what we have done in 6 chapters.In chapter 1, the back ground of MEMS was introduced, and research status of micro pumps and micro motors was analyzed, and the targets and contents of our work were described.In chapter 2, the theories of electrohydrodynamic including electrohydrodynamic in dc fields-electric body forces and electrohydrodynamic in ac fields- ac electrokinetic were introduced. In-depth discussions of their work forms and mechanisms were discussed.In chapter 3 the electric fields and force fields were simulated and compared with several kinds of electrode structures in the effect of dc and ac voltages. A further understanding of the theories of electrohydrodynamics and a series of conclusions were made, and this helped a lot because of the limits of experiment.Electrohydrodynamic motor in ac fields and other devices in dc fields were designed and manufactured in chapter 4 based on the theories in chapter 2and chapter 3. Six electrodes patterns were designed and four kinds of fluids including liquid crystals were chosen for the electrohydrodynamic motor in ac fields in order to study and compare their impacts.The experimental sequence, phenomenon and results were discussed in chapter 5. It was found that the micro rotors rotated unsteady when it was first started. Through the comparison and analysis, we can see the relationships between the rotating speed and the voltage, fluids, the inner diameter and the amounts of electrodes.In the last chapter, a final conclusion of this paper was made, and the future work was prospected.更多还原