【作者】 王艳；

【导师】 闫卫平；

【作者基本信息】 大连理工大学 ， 电路与系统， 2007， 硕士

【摘要】 光纤Bragg光栅因具有体积小、重量轻、耐腐蚀性好、抗电磁干扰能力强等优点,已成为目前最有发展前途的光纤无源器件之一。但是,裸光纤光栅的压力灵敏度较低,光纤光栅对温度和应变同时敏感,在实际应用中必须采取有效的方法解决上述问题。因此,本文针对光纤Bragg光栅传感探头的结构设计,温度/应变交叉敏感解决措施,以及压力灵敏度的提高和封装技术等问题进行研究。采用相位掩模法制备光纤Bragg光栅,在对裸光纤光栅的温度、应变特性进行充分分析的基础上,设计了结构相同的四种不同材料(高弹性不锈钢1Cr₁₈Ni₉、低碳钢Q_235B、铜、铝)的敏感探头,并利用有限元分析方法,对上述材料在均匀分布压力下的受力和形变进行了仿真分析。通过压力传感器结构设计实现温度补偿,解决了温度/应变交叉敏感问题,并通过实验标定出测量光栅的压力、温度灵敏度和参考光栅的温度灵敏度,实现了温度和应变的区分测量。为提高压力灵敏度,分别对敏感探头的材料选择、封装结构的壁厚、光纤光栅的粘贴位置、胶粘剂的选取、退火特性等进行了研究。研究结果表明:光纤Bragg光栅压力传感器具有良好的灵敏度、线性度和重复性,压力灵敏度实验测量数据与理论值基本吻合。在封装技术上,尝试采用了金属化封装光纤光栅压力传感器,对金属化封装光栅的压力、温度特性进行了测试,并与胶粘剂封装的光栅压力传感器进行对比分析。结果表明,金属化封装光纤光栅压力传感器具有精度高、机械强度好、稳定性和可靠性高、适于高温下的压力测量。本文设计的光纤Bragg光栅压力传感器,较好的实现了压力和温度的区分测量,压力灵敏度有一定的提高,并具有结构简单、线性度和重复性好等特点。更多还原

【Abstract】 Fiber Bragg Grating has many unique advantages, such as small size, light weight, strong corrosion resistance, and strong anti-interference of electromagnetism capability etc, so it has become one of the most promising passive optical components. However, the bare FBG has low pressure sensitivity and is simultaneous sensitive to temperature/strain; it needs to take effective method to solve these questions in practical application. Therefore, this paper has studied on the structure design of FBG sensor probe, the problem of temperature/strain cross-sensitivity, as well as increasing pressure sensitivity and packaging technique issues etc.FBG is fabricated using the method of phase mask, based on the full analysis of the temperature/strain characteristics for bare fiber grating, different materials of the same four sensitive probes (highly flexible stainless steel 1Cr₁₈Ni₉, low carbon steel Q_235B, copper and aluminum) are designed. The research adopts the finite element analysis method to make the simulation analysis for the stress and deformation under uniform pressure distribution. To solve the problem of temperature/strain cross-sensitivity, design the structure of pressure sensor to realize temperature compensation, grating pressure/temperature and referring grating temperature are calibrated respectively through experiment, achieved the distinction between temperature and strain measurements. To increase pressure sensitivity, sensitive probe material selection, material thickness, FBG paste location, adhesives selection and annealing characteristics are studied respectively. The results show that FBG pressure sensor has good sensitivity, linearity and repeatability, it has been found that the pressure sensitivity of experimental measurements value consistent well with theoretical value. In packaging technology, this paper attempts to use the metal packaging technology of pressure sensor, testes the characteristics of the metal packaging grating pressure\temperature, and compares with adhesive packaging FBG pressure sensor, the results prove that the metal packaging FBG pressure sensor has the advantage of high precision, good mechanical strength, strong stability and reliability, it’s suitable for high temperature under pressure measurement.FBG pressure sensor distinguishes well pressure\temperature, improves pressure sensitivity, has the advantage of simple structure, good linearity and respectively.更多还原