【作者】 陈明；

【导师】 潘石；

【作者基本信息】 大连理工大学 ， 光学， 2008， 硕士

【摘要】 原子力显微镜自1986年问世以来,经过二十多年的技术改进和应用研究,凭借纳米量级的超高精度和不受样品表面导电性限制等优势奠定了它作为一种独立的表面分析仪器的地位,促进了纳米科技领域的高速发展,尤其在材料学、生命科学和生物学方面的应用研究方面具有较高的科研价值,为这些领域开创了巨大的发展空间。近年来,纳米科技的研究与应用正日渐深入,随着原子力显微镜等显微分析技术的日益深入和完善,在原子尺度和纳米尺度,对材料结构和性能的分析研究备受关注。首先,本论文简述了原子力显微镜（Atomic Force Microscopy,AFM）的发展历程;从理论上探讨了AFM的工作机理;并针对Agilent PicoPlusⅡ型机进行了整机系统的深入了解。其次,以原子力显微镜（Agilent PicoPlusⅡ和Olympus IX71倒置显微镜组成的原子力显微镜系统）为主要研究手段,在室温大气条件下,采用AFM的接触模式,分别对不同温度下采用磁控溅射法制备的Si基底和Ti衬底上生长Al掺杂ZnO透明导电薄膜的样品表面进行扫描成像,并用后处理软件作样品表面粗糙度、颗粒尺度分析。测试观察到当沉积温度小于450℃时样品表面粗糙度、颗粒尺度增大,与非自发成核条件下的成核热力学理论相符;当沉积温度大于450℃时表面粗糙度、颗粒尺度减小,这是薄膜生长过程中应力状态的改变所造成的。用显微拉曼光谱仪（英国Renishaw公司的invia型光谱仪组装的显微拉曼仪）对上述样品作对比测试,得到了基本一致的变化关系。再次,对芳纶纤维、银胶粒子、流感病毒、Ge₂Sb₂Te₅薄膜等进行扫描成像,获得了样品表面微观结构、颗粒尺度、表面粗糙度等信息,扩展了AFM在材料、生物表面观测中的应用。证明了AFM在材料、生物表面形貌、颗粒大小和表面粗糙度研究中能发挥很大的作用。更多还原

【Abstract】 Atomic Force microscope（AFM）,which was developed 1986 and has gone through many improvements in technology and wide applications,establishes its status as a kind of surface analyzed apparatus depending on nanometer-level resolution and unlimited conduction of samples.It has made rapid development in nanometer technology field, especially in biology,life science and material science,plentiful scientific research fruits has been obtained,which widened huge developmental space for those former bottle-neck specialties.The paper firstly introduces the development of Atomic Force Microscopy,and the foundational principles of AFM,then states the whole system of the experiment equipment in this paper--Agilent PicoPlusⅡ.Recently,nano-technology research and application are growing rapidly in depth.With the development of Atomic Force Microscope and other analysis techniques,people pay more attention on structure and properties of the material and biology in atomic-scale and nano-scale.High c-axis oriented Ti tmderlayer ZAO films on Si（100） are deposited by radio-frequency reactive magnetron sputtering.There are several characteristics of ZAO films, those analyzed and studied using Atomic Force Microscopy,such as topography,particle size, and RMS roughness.It is showed that the topography and RMS roughness of the Ti underlayer ZAO is better than that without underlayer.The particle size and roughness of two types of film change at the same trend,that the particle size and RMS roughness increase when the deposition temperature of less than 450℃,and decrease when the deposition temperature greater than 450℃.Raman spectroscopy is used to test the result,and it is found that the results of atomic force microscopy are approximately same with that of Raman spectroscopy.Armos fibers,silver colloid particles,influenza virus,and Ge₂Sb₂Te₅ films is also imaged and analyzed by Atomic Force Microscopy,and the information such as topography, particle size,and RMS roughness is obtained.The application of AFM in observation of nano-material and biology is expanded.It is proved that AFM can play a significant role in getting the information of nano-material and biology,such as topography,particle size,and RMS roughness and so on.更多还原