【作者】 李静；

【导师】 李养贤； 蔡宁；

【作者基本信息】 河北工业大学 ， 材料物理与化学， 2009， 硕士

【摘要】 ZnO透明导电氧化物薄膜是现在国内外研究的热点,由于它有电阻率低、透射率高、并且Zn储量丰富、价格便宜、无毒、在氢等离子体中具有高的稳定性、应用到太阳电池中不会使电池效率降低等优点。因此它是硅基薄膜太阳电池重要的前电极和背反射电极材料,同时也是降低该种电池成本的重要途径。要获得高质量的ZnO薄膜,必须具有优质ZnO靶材。研制适于溅射和电子束蒸发用ZnO靶材是获得优质ZnO薄膜的基础。本文以ZnO粉末和Al2O3粉末为主要原料,以常压空气气氛和常压氩气气氛烧结为手段制备透明导电膜用ZnO陶瓷靶材。首先进行了粘结剂的选择,接下来系统研究了粉末粒径、烧结时间和烧结气氛等因素对ZnO陶瓷靶材电学、物理性能以及显微形貌的影响规律。研究结果表明:1、用2%聚乙二醇做粘合剂有利于靶材的成型,可以得到高质量的生坯,为制得高质量的靶材打下了良好的基础。2、烧结末期(1350℃)烧结时间为2.5h时烧结比较充分且形成的ZnAl2O4尖晶石相比较少,得到的靶材的电学性质较好。3、小粒径掺杂靶材比大粒径掺杂靶材的载流子浓度高,但迁移率却低,最终得到的电阻率的值前者高于后者。但从表面电阻和抑制尖晶石相形成的方面来看前者优于后者。4、氩气气保护气氛下有利于ZnO中缺陷的产生,有利于载流子浓度的增加,有利于电阻率的提高,在氩气气氛下我们得到了电阻率为8.76×10-4Ω·cm的优质靶材。电子束蒸发的ZnO薄膜其特性达到:电阻率: 7.114×10-4Ω·cm,可见光部分的透过率达到了80%～90%。更多还原

【Abstract】 The research of Zinc Oxide transparent conductive oxide thin film is very hot. The film has many particular properties, such as low resistivity, high optical transparency, abundant raw materials, without toxicity, cheap, high stability in hydrogen plasma, and it applied to the solar cells will not reduce the efficiency of the battery. Therefore, it is applied to solar cells as front electrodes and back reflector electrodes and it is the important way to reduce the cost of the battery.High-quality Zinc Oxide targets are necessary to obtain high-quality Zinc Oxide thin films. Researching Zinc Oxide targets that are suitable for sputtering and electron beam evaporation is the foundation to obtain high-quality Zinc Oxide thin films.In this paper, powders of Zinc Oxide and Alumina were used as raw materials. We get Zinc Oxide targets by sintering in air atmosphere and Argon atmosphere respectively. At first, adhesives were selected, then conductivity, physical and micrographs of Zinc Oxide ceramic targets were investigated in the adhesives, the mean particle size of Alumina power, sintering time and sintering gas. The result shows:1, It is good for the molding of targets and to use 2% polyethylene glycol as adhesives. It is the foundation to obtain high-quality Zinc Oxide targets.2, When the holding time of sintering last stage (1350℃) is 2.5h, sintering is full and Spinelle is less. The conductivity of targets is the best. 3, Zinc Oxide powders were mixed with two different Alumina powders with mean particle size of 2.85μm and 2nm respectively.The results showed that the lower mean particle size target has higher carrier concentration, smaller mobility, and higher resistivity.But the surface resistance is better and Spinelle is less than the other one.4, The Argon gas atmosphere is beneficial to the emergence of defects in Zinc Oxide, the carrier concentration and improving the resistivity. We get the high quality targets which resitivity is 8.76×10-4Ω·cm in Argon atmosphere. The film with electron beam evaporation which resitivity is 7.114×10-4Ω·cm and transmittance is 80%～90%.更多还原