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基于DSP的非接触薄膜厚度在线测量系统研究

Research of Online Noncontact Film-Thickness Measuring System Based on DSP

【作者】 万丹

【导师】 何平;

【作者基本信息】 哈尔滨工业大学 , 检测技术与自动化装置, 2007, 硕士

【摘要】 随着现代科学技术的发展,高速度、高精度的在线检测技术越来越受到生产工程领域研究人员的关注,检测技术水平的高低直接影响到生产线的效率及自动化程度。本课题就生产过程中快速、高精度的厚度在线检测问题进行了研究。本文主要从三个方面对快速、高精度的厚度在线检测系统的研制和设计作了详细介绍。硬件电路是系统设计的基础,也是整个检测系统功能实现的关键。结合薄膜生产现场的实际情况,课题选用TI公司的TMS320F2812DSP芯片作为硬件电路的微处理器完成系统中的输入信号检测和系统的控制。硬件电路的设计主要分三大部分来实现:机械传动驱动机构;微处理系统;操作终端。文中详细介绍了它们的设计原理和构造,其中重点介绍了微处理系统的设计。最后介绍了硬件设计过程中常见的干扰问题及课题中采取的消除干扰的措施。接着,对系统的高精度设计方法进行了研究,主要讨论了模拟滤波、数字滤波和电源的选择。文中对数字滤波器与常规模拟滤波器进行了比较,阐述了常用数字滤波方法及其各自的适用场合,研究了各种滤波方法的设计计算公式以及本系统中最终采用的滤波方法及其程序框图。最后对测厚系统的监控软件设计进行了描述。主要内容包括:主监控界面,历史数据查询界面,参数设置界面等。监控终端系统也是整个测厚仪系统的重要组成部分,文中依据界面美观,功能实用,操作方便的思想对系统的监控终端的操作和显示界面以及管理软件进行了程序设计和调试。

【Abstract】 With the development of modern science and technology, researchers on product engineering now pay more attention to on-line testing technology with high speed and high precision. The level of the testing directly affects the efficiency and automatization of the product line. This paper is about research on on-line testing with high speed and high precision in process of production. This paper gives a detailed introduction about our developing and designing process for online noncontact film-thickness measuring system with high speed and high precision based on DSP.Hardware design is the basis of the whole system and the other system designs must be made on the basis of it. Together with the facts, the hardware microprocessor system that made by TMS320F2812DSP chip of TI corporation is used to detect the sample signal and control the measuring system. Hardware circuit design is divided into three parts: mechanically-driven structure, microprocessor system and operation terminal. Their design principles are introduced in details, especially the microprocessor system. The interference questions of hardware design and the measure of eliminating interference signal in the subject are also introduced.High-precision design of this system including analog filter, digital filter and power selection is discussed. The virtues of digital filter compared with analog filter are simply stated. The means for digital filter in common use and their applying occasions together with the calculating formulas are stated. The program flow charts of the filters used in our system are showed.Finally, this paper also describes the monitoring software system of this device including main monitoring interface, historical data inquiring interface and parameters setting interface. Monitoring system is also one of most important parts in the device. It was designed according to the idea of beautiful interface, practical function and easy operation.

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