【作者】 陈庆；

【导师】 刘庆纲；

【作者基本信息】 天津大学 ， 测试计量技术及仪器， 2007， 硕士

【摘要】 角度测量在现代企业的质量保证体系中具有非常重要的地位,也是几何量计量技术的重要组成部分。随着纳米测试技术的进一步发展,高精度、高分辨率小角度测量方法的研究成为此领域研究的一项重要内容。现阶段由于运用了各种先进的测量手段和仪器,使得测量准确度和精度达到了很高的水平。但是,传统的小角度测量仪器如激光干涉仪,光电自准直仪等,由于具有体积大、系统复杂、造价昂贵、对测量环境要求高、较难组成多维测角系统等特点而很难用于工业高精度在线测量。本课题就是在这样的背景下提出来的。为了解决上述问题,本课题基于光学内反射效应,设计并试制了一种新型二维微小角度传感器,实现二维角度的测量,为下一步设计组建小型化多自由度位移检测系统,实现对精密加工机床或坐标测量机的运动姿态及误差的测量奠定基础。本系统采用基于MSP430高性能单片机检测电路进行数据处理,提高系统的响应速度;使用光源调制方法,提高信号的测量精度。以下是本论文的主要研究内容:1.论述了本文研究的目的和意义,查阅了大量的国内外有关技术资料,综合评述了微小角度测量技术的现状和发展趋势。2.从理论上系统的分析了基于光学内反射效应测角法的原理。3.设计制作了一种可调制半导体激光器,包括准直系统和调制驱动电路。4.设计制作了基于单片机系统的处理电路,对其技术性能、工作特性进行了实验研究。5.提出该传感器的评价方法,对影响检测准确度的误差因素进行了比较系统地分析。更多还原

【Abstract】 Angle measurement takes on a important action in the system of quality guarantee of modern enterprises, it is also one of the most important parts in geometry measurement fields. With the further development of nano-measurement technology, the study of micro angle measurement methods with high accuracy and resolution plays a more and more important role in this field. Nowadays, measurement accuracy and precision have been achieved a high level by using various kinds of advanced measurement methods and complicated instruments. However, the traditional angle measurement instruments, such as laser interferometer and optic-electronic autocollimator, can hardly be used as angle sensor in on-line measurement because they are bulky, complicated, expensive, difficult to assemble multi-dimension measuring system and demanding strict work environment.The task is present on background above. To solve the problem metioned above, based on the effect of the optical internal reflection, a new type of two-dimension micro angle sensor is designed and trail made. This work prepares for the next step of designing and establishing a miniaturization multi-dimension angle and displacement measurement system to make a foundation of realizing the measurement of the moving status or errors of precision machining tool or coordinate measurement machine. Detecting circuit based on high performance MCU MSP430 was used to improve the system speed. To improve the system accuracy, light modulation methods were adopted.Five items listed below show the main work done in this paper.1. The purpose of the study is presented. A large number of references are collected and referred to, an overview of the current national and international situation and developmental trends in the field of micro angle measurement methods is discussed.2. The new angle measurement method based on internal reflection effectiveness discussed theoretically.3. Designed a modulated laser diode device, include laser collimated system and modulation and drive circuit. 4. The measurment circuit based on MSP430 has been designed and fabricated. The technical characteristics and performance have been primarily discussed by experiment results.5. The evaluation method of the critical angle sensor is presented. The error factors that affect the measuring accuracy of the measurement system are discussed.更多还原