【作者】 祁森；

【导师】 刘庆纲；

【作者基本信息】 天津大学 ， 测试计量技术与仪器， 2007， 硕士

【摘要】 随着时代的发展,科技也在向前飞速发展,电子器件呈现出微型化和高速化的发展趋势。由于传统电学测量方法,受到它自身性能的限制,不能准确、快速的对超高速器件进行测试和性能评价。所以寻求速度更快的测量方法就显得迫在眉睫。在这样的背景下,本课题采用原子力显微镜针尖氧化方法加工超快光电导开关作为超快电信号产生源,研究了电光采样和自相关两种超高速测量方法,同时搭建了光电采样系统的光路和电路,以期发展出应用于超快器件输出性能描述的自动测试系统。本论文的主要研究内容和取得的研究成果如下:1.在查阅文献的基础上,对目前所应用的各种光电时域采样电信号测量技术进行了分析比较。2.通过分析光电导开关的基本原理,设计超快光电导开关,包括衬底材料的选择,具体结构和加工方法的设计等;通过理论计算获得超快光电导开关的输出特性。3.利用原子力显微镜加工超快光电导开关器件原型。4.根据晶体光学原理,分析电光效应产生的机理,并由此引申出电光采样技术的原理,研究其主要评价参数。5.设计电光采样系统整体结构,设计光机械延迟线结构、电光采样结构、光电转换及微电流放大电路、锁相检测模块;使用LabVIEW编写基于GPIB接口的仪器控制与通讯及结果显示界面。6.搭建测试电光采样系统原型,包括光路部分和电路部分。并测试系统关键组成部分,对其可能影响的系统整体性能进行分析。7.研究了自相关测量方法。更多还原

【Abstract】 With the rapid development of nano-technology, the electric devices become continually mini and high-speed. Traditional electronic methods, limited by their intrinsic problems, are not able to measure and test devices quickly and exactly, challenging the ability to measure them.In our research, a new photoconductive switch, which serves as the source of ultrafast electrical signal, is fabricated using Atomic Force Microscope (AFM). The prototype of an electro-optic sampling (EOS) system and the auto correlation measurement system are studied, designed, and constructed to measure the ultrafast signal. The key components influencing the system’s overall performance are analyzed and tested, in order to develop the automatic test system.The main contents of this paper include:1. Based on comprehensive reference, the techniques used for ultrafast electrical signal’s characterization are reviewed and compared.2. By analyzing the fundamental principle of photoconductive switch, the ultrafast photoconductive switch is designed, including choice of its substrate material and design of its structure and fabrication method. The output characteristic of the photoconductive switch is also calculated, theoretically.3. The prototype of the ultrafast photoconductive switch is fabricated using AFM.4. Based on crystal optics, the principle of electro-optic effect is analyzed, from which the principle of the EOS technique is introduced. Parameters used to evaluate the performance of an EOS system are studied.5. The structure of the EOS system is designed, including opto-mechanical delay line (OMDL), embodiment of electro-optic modulator, and lock-in detection module. User’s interface is developed, using LabVIEW.6. The prototype of the EOS system, including the optical part and the electrical part is constructed.The key components of the EOS system are analyzed and tested.7. Auto correlation measurement system of PCSS was designed更多还原