欧泊与反欧泊结构三维光子晶体的制备与表征

【作者】 常伟；

【导师】 范广涵；

【作者基本信息】 华南师范大学 ， 微电子学与固体电子学， 2007， 硕士

【摘要】 自从Yablonovitch和John于1987年提出光子晶体的概念后，关于光子晶体的研究便吸引了众多领域的兴趣。其光子禁带特性可以被用来控制自发辐射或提高LED的光提取效率。本论文旨在通过对欧泊及反欧泊三维光子晶体制备的实验研究，改善三维欧泊及反欧泊光子晶体MOCVD法生长质量的目的。本论文的主要工作如下：（1）介绍了光子晶体的产生、发展历程和制备方法等。（2）制备了人工欧泊SiO₂光子晶体模板并运用有机金属化学气相沉积（MOCVD）技术在SiO₂光子晶体模板中生长填充了InP。实验研究了不同成核条件对于生长填充InP的影响。对所制备的欧泊及反欧泊结构光子晶体的光子带隙进行了理论分析和模拟计算，引入“材料有效介电常数”的概念改进了传统的计算方法，计算结果比传统方法更接近实验结果。（3）介绍了光子晶体的理论研究方法并采用MOCVD技术制备了InP反蛋白石结构三维光子晶体，获得了较好的填充率和结晶质量。为制备三维全带隙InP光子晶体提供了科学依据。（4）介绍了LED的历史及应用发展前景，分析了光子晶体在LED中的设计应用。更多还原

【Abstract】 Photonic crystals have recently attracted much interest since the pioneering workof Yablonovitch and John. Such photonic band gaps can be exploited to control as wellas enhance spontaneous emission or the light extraction efficiency in light-emittingdiodes.In this thesis, in order to improve the quality of material, the preparation andcharacterization of opal&inverse opal three-dimentional photonic cystals has beeninspected and analyzed by experiment research. The main work is showed as follow:（1） Photonic Crystal is a kind of material with periodic arrangement of differentdielectric media. A brief introduction is given of photonic crystal, including its history,evolution, and fabrication methods.（2） SiO₂ artificial opal templates are fabricated, and then metal organic chemicalvapour deposition has been used to infill the voids of prepared silica colloidal crystalswith InP. The effect of experiment condition is researched. The plane-wave expansionmethod is used to calculate the band structure of opal&inverse opal three-dimentionalphotonic crystals. We improved the traditional method by concept ’effective index’ andgot a better result.（3） Introduce several studying method of the photonic crystal’s theory. Thephotonic crystal of InP three-dimensional（3D） inverse opal structure is fabricated byMOCVD. The study gets good results and provides a scientific basis for manufacturingInP three-dimensional photonic crystal.（4） The history and evolution of LED are introduced, and the application areelaborated. The photonic crystal’s application in the fabrication of photonic crystal wasanalysed.更多还原