【作者】 唐勇；

【导师】 陈维友；

【作者基本信息】 吉林大学 ， 微电子学与固体电子学， 2007， 硕士

【摘要】 光衰减器,是一种旨在降低波导中传输的光功率的器件,可以按照用户的要求将光信号能量进行预期地衰减,它是随着光通信事业发展出现的一种非常重要的纤维光学无源器件。随着近年来宽带光通信网络,特别是全光网络的迅速发展,光衰减器在波分复用(WDM)光纤网络中发挥着重要的作用,市场需求增长十分迅猛。本论文利用聚合物分散液晶材料,将MEMS技术中体硅微细加工工艺与液晶技术结合起来研制一种新型的聚合物分散液晶可变光衰减器的原形器件。本文的主要内容是:首先介绍了光衰减器的种类和工作原理,然后设计了制作液晶可变光衰减器原型器件的工艺流程,制作出单通道以及8*8通道的自对准光纤定位槽,并且对单通道的衰减器进行了光电特性的测试。最后介绍了PDMS材料在本项目中的应用。更多还原

【Abstract】 With the development of science and technology, the fiber optic communication has already become an important branch of the communication field. Following the rapid development of the fiber optic communication system, Passive device technology, as the foundation of optical communication, develops rapidly too. Optical attenuator is a kind of device aiming at reducing the light power transmitting in wave guide and can decay the power of the light signal as much as the user expects. It is a kind of very important passive device of fiber optics and has become the most basic optical passive device with connector, coupler, isolator etc. together. With the rapid development of all optic-networks, the optical attenuator is playing an important role in wavelength division multiplexing (WDM) systems, and the market demand increases very swiftly and violently.At present, the components in optical network are in more demand of dealing optical signal with high reliability, power consumption little and miniaturization with the optic communication development. Utilizing the polymer network liquid crystal material, combining body silicon micro machining technology and liquid crystal technology together we are developing a novel polymer dispersed liquid crystal variable optical attenuator. The working mechanism of polymer dispersed liquid crystal variable optical attenuator is shown as below: Liquid crystal molecules are inserted in the middle of two transparent conductive electrodes. If no voltage is applied on the electrodes, molecules arrange the liquid crystal unordered, so the incidence light beam has been affected by scattering and the output optic power is very small. When the voltage is applied on the electrodes, molecules arrange the liquid crystal in order and present the transmission state, so the output optical power can be very heavy. In this process, optical power of transmission alters from minimum to maximum.The key problem to solve is to design and carry on the fabrication technology of the prototype device of the attenuator in the project. It is reported abroad using planar wave guide or optic fiber glass capillary structure at present. We adopt the silicon micro machining technology to get self-aligned grooves on (100) silicon wafer, design liquid crystal little box structure and combine the polymer network liquid crystal technology together to find out the fabrication technology of the prototype device of the attenuator. This research scheme at present not still seen at home and abroad is innovative. The research scheme adopting silicon micro machining technology connects optic fiber coupling structure and decay function part into a whole, making the device architecture easier to integrate. Comparing with other MEMS micro-structure optical attenuators, our designing fabrication process is comparatively simple; comparing with machinery attenuator made by traditional technology, our attenuator has the advantages such as a small and exquisite volume, low costs, being apt to realize many arrays of the devices. There are very great market potential and wide application prospect.A novel variable optical attenuator(VOA)based on polymer-dispersed liquid crystals(PDLC) is presented. The device employs PDLC into the optical path of two collimated single-mode fibers with the transparent ITO electric thin films as the electrode of the PDLC. Utilized the electro-optic properties of PDLC under the condition of the different electric field intensity to realize the continuous controllable attenuate on the power of the optical path.The VOA was fabricated by silicon micromachining techniques and the performance is evaluated. The measuring results show the insertion loss of the fabricated VOA is below 0.85dB,maximum attenuation range is about 14 dB at 1550nm ,and a applied voltage of VOA less than 57 volt. Finally,we Manufactured the the molding tool of fiber-optic slot making use of the high fidelity characteristic in the Process of polymerization of the PDMS materials . The whole technical process will cost 10 hs. The molding tool have the advantages the high hardness and long working life . After a series of unsuccessful technology attempts,we can make the high quality molding tools . The process need lower facility request,shorter time,and have higher quality thoroughfare. being acclimated to the fast executing research time,and the demands of making the small batch size,high quality chips.更多还原