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相移干涉术中相移误差校正算法及应用研究

Study and Application of Error-compensating Algorithm in Phase-shifting Interferometry

【作者】 毕精会

【导师】 钱晓凡;

【作者基本信息】 昆明理工大学 , 物理电子学, 2006, 硕士

【摘要】 相移干涉计量作为干涉计量的一种方法,人们对其进行了广泛的研究,提出许多新的相移实现方法和计算方法,由于它的测量精度高,可以准确地确定光场上任意点的相位,真正实现全场测量,受干涉图像的品质影响小,不受条纹形状的限制,速度快,可以实现实时测量等特点。已经成为干涉计量中的一种常规方法,被广泛地应用在各个领域,如三维形貌测量、数字全息显微术、粗糙度检测、图像的加密及水印技术等方面。在这种测量方法中相移的准确与否对测量结果的准确性有很大的影响,虽然已经出现了很多算法能够抑制相移误差,但这些方法都或多或少地有缺陷,要很好地消除相移过程中出现的相移误差对相位测量的影响,还存在一定的困难。本文介绍了一些常用的相位提取算法,并对各种算法进行了比较,提出了一种用余弦拟合求解相位分布的方法,将待分析全息图中相同区域的干涉条纹作比较、计算,求解出实际相位值和相移量,进而通过相位重构与相移误差之间的关系,给出修正计算公式,达到抑制相移误差导致的相位测量误差的目的。文章给出了新算法的计算公式,详细说明了相移误差的求解过程,给出了计算机模拟结果,并通过试验测量数据处理,验证了新算法的有效性。

【Abstract】 The technology of phase-shift interference is researched as a kind of measuring in interference computation. In this field, several new phase- shifting methods in practicing and computing are advanced. Because its precision is high, and it can define any point in the square accurately. That is to say, the method can practice the whole field orientation. And its performance contains several other characteristics, such as little influenced by the quality of the interference pictures, never limited by the shape of the stripe, high computing speed and realizing the real-time measuring. Because of the strong-points depicted upwards, the method becomes one of the main interference computation and it is widely used in several fields, such as the measurement of 3-D shape, the technology of digital micro holography, the detection of coarseness, the encryption of images and the technology of water marked.The precision of phase-shifting in this measuring technique or not has the very tremendous influence to the measurement result accuracy. Although many algorithms have been appeared to be able to suppress the phase-shifting error, these methods all more all less have the flaw. So to eliminate the phase-shifting error well which in the phase-shifting process have the certain difficulty.This article introduces some commonly used phase extraction algorithms, carries on the comparison to each algorithm, and presents one algorithm with the cosine fitting to the phase distribution. It make the comparison and computation in the same region interference fringe to solve the actual phase value and the phase-shifting quantity, then produces the correction computation formula through the relation between the phase construction and the phase-shifting errors, and achieved the suppression phase-shifting error’s goal. The article presents the new algorithm formula and describe phase-shifting error solution process, then give the computer simulation result and the experimental survey data processing, at last, confirmed the new algorithm is validity.

  • 【分类号】TN29
  • 【被引频次】8
  • 【下载频次】453
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