基于柔性衬底的微型换能器技术

【作者】 王艳；

【导师】 马炳和；

【作者基本信息】 西北工业大学 ， 微机电系统与纳米技术， 2007， 硕士

【摘要】 柔性MEMS器件具有非常广泛的应用前景。本文以柔性衬底基微型换能器为研究对象，对MEMS柔性衬底技术展开研究，设计研发了气泡型微致动器和柔性触觉传感器。 论文阐述了聚酰亚胺基、PDMS基、金属基三种不同柔性衬底基微型换能器的工艺实现方法。 针对金属基柔性微换能器实现方法，研发了一种用于主动流动控制的气泡型微致动器。设计了微致动器的结构，并对其变形行为进行仿真分析。采用光刻、刻蚀、旋涂等工艺制作了气泡型微致动器。通过对气泡样件的压力载荷-变形行为测试，表明致动器具有较好的线性度和较大承载能力。结合特定翼型的风洞实验，验证微致动器作动可以影响翼型表面的压强分布，从而可用于增升等控制目的。 通过对聚酰亚胺基和PDMS基微型换能器的研究，设计了一种柔性开关式微型触觉传感器。对触觉传感器的结构进行了设计，并通过仿真分析研究不同结构尺寸对其变形行为的影响，得到了优化的结构尺寸。按照设计出的传感器结构，提出了两种衬底材料的触觉传感器加工工艺，并采用覆铜聚酰亚胺薄膜制作了微触觉传感器。更多还原

【Abstract】 The micro transducers with flexible substrate have showed great advantages for some special application. In this paper, the processing methods of micro transducers with three types of flexible substrate are presented. And micro balloon actuator array with metal-based substrate and micro tactile sensor with polyimide and PDMS substrate are developed.As a typical metal-based flexible micro transducer, a micro balloon actuator for active flow control is developed. The structure of micro balloon actuator was designed. And the actuators are fabricated by specific processing. Load-actuation deflection behavior of the actuators has been characterized, which shows such kind of actuator has high load limit and good linearity of pressure load-deflection behavior. Wind tunnel experiments are carried out. And the results indicate that the micro balloon actuator is an effective means for the drag reduction or lift increase of airfoil.Utilizing polyimide and PDMS as substrate respectively, two kinds of flexible micro tactile sensors are developed. The structures of these sensors are designed and the detecting circuit is described. The focus is on the optimization of the structure dimension. And the corresponding fabrication processes of the sensors with two substrates are investigated. One kind of the sensors is fabricated using the flexible copper-clad polyimide film.更多还原