【作者】 施秋萍；

【导师】 赵玉涛；

【作者基本信息】 江苏大学 ， 材料加工工程， 2006， 硕士

【摘要】 利用磁控溅射技术在Ti6Al4V基体表面成功制备了HA／YSZ梯度复合涂层，涂层由5层组成，从基体表面开始，每层成分依次为2HA／8YSZ、4HA／6YSZ、6HA／4YSZ、8HA／2YSZ和纯HA（上述HA和YSZ以质量百分含量计算），五层涂层依次用相同的工艺溅射。通过合理选择溅射工艺参数的优化后处理工艺，制备得到了成分均匀分布、界面结合力较高、生物活性优良的HA／YSZ生物活性梯度复合涂层。利用X—射线衍射仪（XRD）、扫描电镜（SEM）、原子粒显微镜（AFM）、红外光谱（IR）、电子探针（EMPA）、划痕仪等多种现代分析手段，研究了HA／YSZ梯度复合涂层的物相组成、表面和界面微结构、力学性能以及后处理工艺对涂层物相和微结构的影响，同时分析了HA／YSZ梯度复合涂层在模拟体液（SBF）条件下生物活性及其机理。 采用溶胶—凝胶法制备微纳米级HA粉体以及HA／YSZ复合粉体。实验检测结果显示以磷酸三甲脂[（CH₃O）₃PO₄]和硝酸钙[Ca（NO₃）₂．4H₂O]为原料，采用溶胶一凝胶法，聚乙二醇为表面活性剂，静置过程对溶胶进行机械搅拌和超声振荡，可以制备出物相较纯、粒度均匀的HA粉体，粉体以短棒状为主，颗粒长度约为80nm，宽度约为20nm。 粉体利用热压烧结法制备溅射靶材。合理控制烧结工艺，可以制备得到成分与原始粉体一致的靶材。靶材致密较高，满足溅射用靶材的质量要求。 对溅射和后处理涂层XRD物相检测结果发现，用磁控溅射法制备的涂层HA为非晶结构；大气条件下对涂层600℃×4h热处理后，可恢复HA的结晶度。EDX检测涂层表面特定点的n（Ca）／n（P）比约为更多还原

【Abstract】 HA/YSZ gradient composite coatings have been successfully deposited on Ti6Al4V substrate through the method of Radio Frequency Magnetron Sputtering. The X-ray Diffraction （XRD）, Scanning Electron Microscopy （SEM）, Atomic Force Microscope （AFM）, Infrared Absorption Spectrometry （FTIR）, Electron Probe Microscope （EPMA）, Scratch Equipment and Simulated Body Fluid （SBF）, et al were adopted to analyze the chemical composition of the coating, the microstructure of the coating surface and interface, the bonding strength between the coating layers and coating-substrate, and the bio-activity of the composite coating as well. Meanwhile the influence of the heat treatment to the chemical composition and microstructure of the composite coating, the bonding mechanism of between the coating and the substrate, and the bio-mechanics of the composite coating in SBF were analyzed in this paper.Hydroxyapatite powder was synthesized through Sol-gel method. [（CH₃O）₃PO₄] and [Ca （NO₃）₂·4H₂O] were used as the raw materials and polyethylene glycolthe as the surface active agent, and the sol was agitated by the mechanical bar and the ultrasonic. The experimental results show that the chemical composition of the HA powder is homogeneous and well-distributed. The powder pattern is like the rice particle; with the average size are 80nm in length and 40nm in width.The high tightness sputtering targets were obtained through hot pressed sintering method. By adjusting processing parameters, chemical compostions of the targets are similar to the powder, which meet the requirements of the sputtering targets.Sputtering experimental results indicate that the sputtered films are in amorphous state. The OH^- in hydroxyapatite is decomposed fully during sputtering, while the OH^- is recovered after 600℃ × 4h heat treatment The n（Ca）/n（P） ratio of HA films is about 1.7. The surface of the composite coating is uneven with the porosity is 35%-45%, the aperture is above 10μm . The thickness of the coating is in the range更多还原