【作者】 徐红；

【导师】 袁怡宝；

【作者基本信息】 哈尔滨工业大学 ， 仪器科学与技术， 2006， 硕士

【摘要】 表面台阶高度测量在表面计量学中有十分重要的作用。一方面,表面测量技术通过台阶高度可以溯源到米的定义;另一方面,半导体制造业为主的工业产业中涉及大量的台阶高度的检测问题。台阶高度是一个重要的参数。本文基于触针式测量原理,建立了检测表面形貌参数和表面台阶高度的一套分析及处理系统,实现了台阶高度的计算机分析评定。该系统首先对表面信号进行采样,转换成数字信号后输入计算机,然后进行数字滤波分离出粗糙度信号,据此可以评定表面粗糙度。而对于台阶高度测量,论文中提出将微分法用于对台阶边缘进行准确的定位瞄准,确定台阶的宽度。根据台阶边缘检测结果,选取部分采样点数据,用最小二乘法进行直线拟合。分别使用ISO 5436标准中推荐的ISO算法以及美国国家标准与技术研究院(NIST)推荐的Two-sided算法,计算台阶高度。对实测中台阶倾斜问题提出轮廓调平的处理方法。实测数据的分析表明这几种台阶高度计算算法是可行的,其中Two-sided算法计算结果最接近真值。最后,对整个系统进行了校准,分析了系统的不确定度。更多还原

【Abstract】 The measurement of step height of surface plays a very important role in the surface metrology. On the one hand, the definition of meter can be trace to the source via the step height in the surface measurement technology; On the other hand, the problems of measurement of step height occur almost everywhere in the industrial domain that relies mainly on semiconductor manufacturing. Step height is an important parameter.A data analysis and processing system is built for the surface features and the step height measurement based on the stylus-measurement theory. The analysis and evaluation of step height via computer is achieved in this system.Firstly, a computer samples the surface profile signal. Secondly, the surface roughness is extracted though a digital filter, and then the surface roughness can be evaluated. In this thesis, the maximum differentiation of the height is used for the accurate anchor of the edge of the step, and then the width of the step is calculated. Based on the results of the edge anchor, several segments of the height data are selected and linear polynomial fitting are done using least square approximant on these segments separately. Then, the step height is calculated with some algorithms: the ISO algorithm adopted by ISO 5436 and the two-sided algorithm used at NIST (the National Institute of Standards and Technology). A balance method is advanced to solve the tilting problem on the height measurement. The analysis of a set of test data shows that all of the algorithms are acceptable, and using the balance method can get a more accurate result. Finally, the calibration of the system is discussed, and the uncertainty of the system is analyzed.更多还原