【作者】 谢浩锐；

【导师】 钟景昌；

【作者基本信息】 长春理工大学 ， 凝聚态物理， 2004， 硕士

【摘要】 垂直腔面发射激光器(Vertical-Cavity Surface-Emitting Lasers，简称VCSELs)作为一种新型激光器，具有优越的光电性能，且出射光垂直于衬底，便于制作高密度二维阵列，所以垂直腔面发射激光器阵列的相关研究成为世界范围内的研究热点。 本文从VCSEL的基本理论出发，研究了作为VCSEL谐振腔镜的分布布拉格反射镜(Distributed Bragg Reflectors，简称DBR)的特性，得到DBR的相关参数。讨论阵列中的热效应，得出各单元器件之间的最佳距离。研究了湿法氧化工艺，得到最佳氧化参数，并对VCSEL芯片进行氧化，制成了3×3阵列。最后自制了VCSEL测试系统，可以用于VCSEL整片性能的初步测试，包括是否发光、阈值电流、近场、远场等。更多还原

【Abstract】 Vertical-cavity surface-emitting lasers (VCSELs), as a new type of lasers, possess superior photoelectric performances. VCSELs are convenient to be produced two dimensional high-density arrays because of their output beams vertical to substrate. So the related researches on VCSELs arrays have turned into a hotspot in the world.Starting with the fundamental theories, this paper studies the characteristics of Distributed Bragg Reflectors (DBR) as VCSELs’ resonant cavity mirrors and gains the related parameters. After discussing the heat effects in arrays, we get the optimal distances between devices. We investigate wet oxidation technique and obtain the best appropriate oxidation parameters. The VCSELs chips oxidated are employed to a 3 × 3 arrays. In the end , we make out a VCSELs testing system by ourselves which can be used to elementarily measure the properties of the VCSEL chip including radiation, threshold current, near field, far field, etc.更多还原