【作者】 曹焕丽；

【导师】 廖斌；

【作者基本信息】 华东师范大学 ， 无线电物理， 2006， 硕士

【摘要】 射频／微波电感耦合等离子体自上世纪九十年代初出现以来，以其突出的优点和优越的性能受到越来越多的关注和研究，但是由于射频／微波电感耦合等离子体技术发展比较晚，目前还没有成熟的理论和计算设计方法。随着现代科技和MEMS工艺的发展，人们对电感耦合等离子体源的性能提出了更高的要求，所以如何有效地设计电感耦合等离子体源就成为电感耦合等离子体技术中的重点和难点。本文针对目前人们对小功率平面螺旋微波激励的ICPS的需求，对平面微带螺旋微波激励的ICPS进行了理论上的分析，进而对其参数进行了等效分析计算，分别用MATLAB和HFSS进行了仿真，以观察电感线圈的匝数n、微带线的宽度w、匝间距s等参数对天线性能的影响，尤其是对品质因数Q的影响。从MATLAB的仿真结果看，在固定的外直径的情况下，匝数n、线宽w、间距s都分别存在一个最佳值，使得电感线圈的品质因数Q取得最大值；不同的外直径，参数的最佳值是不同的；用HFSS对电感线圈不同的尺寸进行仿真；两种结果进行比较，基本吻合。最后设计出2.45GHz微波源的平面微带螺旋ICPS天线，天线的线圈部分外直径为2mm，总长度为3mm，天线的Q值达到800多。此天线具有了小型化、易集成等特点，为长寿命、高密度、分布均匀等离子体的激励提供了一定的理论基础。更多还原

【Abstract】 Radio frequency/microwave inductively-coupled plasma (ICP) source has emerged since the early 1990s, which was researched more and more by community and scientists for superior performance. However, one developed the RF/microwave inductively coupled plasma technology so lately that the mature theory and designing methods are not given by far. With the rapid development of modern technology and MEMS technique, higher performance is required in the inductively-coupled plasma source (ICPS), so it becomes a focus and difficulty how to effectively design ICPS in ICP technology. In the paper, a planar microstrip spiral low-power microwave ICPS was analyzed in theory, the parameters of its equivalent circuit was calculated, and it was simulated using MATLAB and HFSS in order to obtain relationship which is caused by various parameters to the antenna’s performance, especially to the quality factor Q; these parameters included turns n, microstrip line’s width w, space between two turns s. The MATLAB simulation results showed that the n, w and s respectively have the best value, and the best values which made the quality factor Q to achieve maximum was different when the diameter of outside was not same. The two results were compared and validated, and the two kinds of conclusion was unanimous roughly. Finally a planar microstrip spiral ICPS antenna at 2.45GHz by microwave inspired is designed, the coil’s diameter was 2mm, the total length was 3mm, the quality factor achieved over 800, which was characteristic of miniaturization and being integrated easily. It can provide the basis for excitation of long life, high-density and homogeneous plasma.更多还原