【作者】 赵星；

【导师】 云乃彰；

【作者基本信息】 南京航空航天大学 ， 机械制造及自动化， 2006， 硕士

【摘要】 本文概述了微机电系统,介绍了微细制造技术及低速走丝电火花线切割微细加工技术的现状;研究了实施低速走丝电火花线切割微细加工的基础条件,着重分析了低速走丝电火花线切割微细加工用于MEMS器件制造的理论可能,并加以实践。本论文基于AGIECUT CHALLENGE ECUT 2F机床和ESPRIT软件,以微小复杂零件加工为目标,在学习和研究由微小能量脉冲电源、低速走丝系统、加工状态检测与控制系统、微进给伺服控制机构等构成的精密数控电火花线切割加工系统的基础上,进行了微细切割工艺基础实验,并且展开了大量的实用性试验研究:从典型微小零件的工艺设计,线切割数控加工编程,选择工艺参数到加工典型零件(如模数为0.0413mm的微小齿轮、用于交错展成电火花成形加工用电极齿条、微型通讯器件插片等)和上下异形的零件。试验过程中,分析了非电参数(电极丝参数、浸没加工冲液参数等)、电参数(放电电流、放电功率、闲置脉冲百分率、以及衍生参数单边放电间隙)等工艺因素对电火花线切割微细加工精度、工件表面质量、加工效率、过程稳定性的影响,探讨了微小零件(如槽、异型孔及微小齿轮等)的加工工艺。通过调整和优化各种工艺参数,成功地加工了多种典型试件和造型独特的微小试件,在加工速度、成形精度和表面质量方面获得均较理想的工艺指标:利用直径为ф30μm的TWS电极丝,在厚度为1mm的不锈钢上加工出宽度为48μm的微小槽及模数为40μm的微小齿轮等,其表面变质层厚度小于2μm,表面粗糙度Ra0.7μm,从而证实了低速走丝电火花线切割微细加工制造MEMS微小器件的可行性和优越性。论文最后对低速走丝电火花线切割微细加工技术的后续研究提出了设想和展望。更多还原

【Abstract】 In this paper, the basic concept and the characteristics of MEMS ( Micro–electro -mechanical System ) are presented. MEMS technology is a hot spot of science and industry in the 21st century, and micro-machining technologies are the key problems of MEMS development. Meanwhile, the actuality of micro-machining technology both domestic and abroad is presented in this paper, especially the micro-LS-WEDM technology.The paper discusses the key techniques of Micro LS-WEDM to meet the needs of high precision and surface integrity, such as the pulse generator with micro energy and precise control of energy discharging, the gap characteristic of fluid, etc. And the main technical aspects that influences the machining performance mostly. Basing on the AGIECUT CHALLENGE ECUT 2F machine tool and the Esprit software, we laid a strong emphasis on the application of WEDM technology on some classical and intricate micro-parts, and we finally successfully fabricated the finest and smallest standard-involute-microgear and several micro intricate parts which are practically used in the Telecommunication Industry ultimately. Also the possibility and prosperity of the combined technology of LS-WEDM and EDM for machining MEMS instruments are emphasized and attempted successfully, we finally made several micro mechanical structure like a micro-flowmeter by the combination of the up two technologies, in which the micro-gear (m=0.1mm) and the electrode of the micro-gap are fabricated by the LS-WEDM technology.At the end of this paper, the later studies on the Micro LS-WEDM technology and the combination of different micro untraditional machining technologies are suggested.更多还原